Optical thin film measurement tool for clean room processing

Inglis, David (Primary Chief Investigator)
Town, Graham (Chief Investigator)
Heimlich, Michael (Chief Investigator)
Connally, Russell (Chief Investigator)
Kane, Deb (Chief Investigator)

School of Engineering

Project: Research

Status	Finished
Effective start/end date	1/01/11 → 31/12/11