Power scaling of remote plasma sources for gallium nitrade film growth with real-time monitoring of activated nitrogen species

  • Carman, Robert (Primary Chief Investigator)
  • Kane, Deb (Chief Investigator)
  • Boswell, Roderick (Chief Investigator)

    Project: Research

    Project Details

    StatusFinished
    Effective start/end date16/01/09 → 30/06/12