3D characterisation using plasma FIB-SEM: a large-area tomography technique for complex surfaces like black silicon

Engineering & Materials Science

• Beam plasma interactions 20%
• Catalysts 10%
• Electron microscopes 98%
• Etching 27%
• Focused ion beams 54%
• Image processing 10%
• Metals 8%
• Needles 13%
• Plasmas 95%
• Reactive ion etching 35%
• Scanning 79%
• Silicon 81%
• Surface morphology 14%
• Surface roughness 10%
• Surface topography 31%
• Tomography 100%

Physics & Astronomy

• artifacts 8%
• augmentation 5%
• beam interactions 12%
• catalysts 8%
• characterization 57%
• electron microscopes 82%
• etching 28%
• image processing 9%
• ion beams 21%
• ions 8%
• needles 9%
• preparation 6%
• reactivity 9%
• roughness 7%
• scanning 65%
• silicon 55%
• tomography 82%
• topography 17%
• trapping 7%

Chemistry

• Black 92%
• Electron Particle 56%
• Etching 28%
• Ion 8%
• Ion Beam 34%
• Length 6%
• Needle Like Crystal 11%
• Plasma 64%
• Sample Preparation Method 12%
• Surface 33%
• Surface Area 6%