A quantitative analysis of single pulse ultraviolet dry laser cleaning

D. R. Halfpenny; D. M. Kane

doi:10.1063/1.371737

A quantitative analysis of single pulse ultraviolet dry laser cleaning

D. R. Halfpenny, D. M. Kane

Research output: Contribution to journal › Article › peer-review

71 Citations (Scopus)

Abstract

Particles as small as 0.3 μm in diameter have been successfully removed from a glass surface using a single ultraviolet pulse from a frequency doubled copper vapor laser (255.3 nm). Quantitative analysis of the particle density before and after laser irradiation shows that laser cleaning occurs after a fluence threshold is reached. The cleaning efficiency after threshold follows a nonlinear trend with respect to fluence. A model is presented which reveals that the cleaning efficiency is a function of the irradiance distribution of the beam used. Results of modeling thermal expansion of the substrate and particles, and particle adhesion do not confirm a thermal expansion mechanism for laser cleaning in this study, in contrast with other recent reports.

Original language	English
Pages (from-to)	6641-6646
Number of pages	6
Journal	Journal of Applied Physics
Volume	86
Issue number	12
DOIs	https://doi.org/10.1063/1.371737
Publication status	Published - Dec 1999

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@article{19c4acf4b2ff4e3bab4b831337b45f60,

title = "A quantitative analysis of single pulse ultraviolet dry laser cleaning",

abstract = "Particles as small as 0.3 μm in diameter have been successfully removed from a glass surface using a single ultraviolet pulse from a frequency doubled copper vapor laser (255.3 nm). Quantitative analysis of the particle density before and after laser irradiation shows that laser cleaning occurs after a fluence threshold is reached. The cleaning efficiency after threshold follows a nonlinear trend with respect to fluence. A model is presented which reveals that the cleaning efficiency is a function of the irradiance distribution of the beam used. Results of modeling thermal expansion of the substrate and particles, and particle adhesion do not confirm a thermal expansion mechanism for laser cleaning in this study, in contrast with other recent reports.",

author = "Halfpenny, {D. R.} and Kane, {D. M.}",

year = "1999",

month = dec,

doi = "10.1063/1.371737",

language = "English",

volume = "86",

pages = "6641--6646",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "12",

}

TY - JOUR

T1 - A quantitative analysis of single pulse ultraviolet dry laser cleaning

AU - Halfpenny, D. R.

AU - Kane, D. M.

PY - 1999/12

Y1 - 1999/12

N2 - Particles as small as 0.3 μm in diameter have been successfully removed from a glass surface using a single ultraviolet pulse from a frequency doubled copper vapor laser (255.3 nm). Quantitative analysis of the particle density before and after laser irradiation shows that laser cleaning occurs after a fluence threshold is reached. The cleaning efficiency after threshold follows a nonlinear trend with respect to fluence. A model is presented which reveals that the cleaning efficiency is a function of the irradiance distribution of the beam used. Results of modeling thermal expansion of the substrate and particles, and particle adhesion do not confirm a thermal expansion mechanism for laser cleaning in this study, in contrast with other recent reports.

AB - Particles as small as 0.3 μm in diameter have been successfully removed from a glass surface using a single ultraviolet pulse from a frequency doubled copper vapor laser (255.3 nm). Quantitative analysis of the particle density before and after laser irradiation shows that laser cleaning occurs after a fluence threshold is reached. The cleaning efficiency after threshold follows a nonlinear trend with respect to fluence. A model is presented which reveals that the cleaning efficiency is a function of the irradiance distribution of the beam used. Results of modeling thermal expansion of the substrate and particles, and particle adhesion do not confirm a thermal expansion mechanism for laser cleaning in this study, in contrast with other recent reports.

UR - http://www.scopus.com/inward/record.url?scp=0000715713&partnerID=8YFLogxK

U2 - 10.1063/1.371737

DO - 10.1063/1.371737

M3 - Article

AN - SCOPUS:0000715713

VL - 86

SP - 6641

EP - 6646

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 12

ER -

A quantitative analysis of single pulse ultraviolet dry laser cleaning

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