Abstract
To search a suitable material candidate for "all-Si" tandem solar cell, a hybrid super-lattice structure consisting 30 periods of alternating amorphous Si0.7 C0.3 (5nm) layers and ultra-thin Si3N4 barrier layers (0.2-2.0nm) has been deposited by magnetron sputtering with subsequent annealing by a rapid thermal annealing (RTA) process. Structural and electrical characterization of the layered film was carried out after annealing. 8nm barrier layer thickness is proven to be able to provide sufficient structural confinement even after high temperature annealing. Increased resistivity was measured for the overall multi-layer structure, resulting from the incorporation of the Si3N4 barrier layers hence likely suppressing carrier transport and further electron hopping is proven the main transportation mechanism.
Original language | English |
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Pages (from-to) | 271-281 |
Number of pages | 11 |
Journal | Energy Procedia |
Volume | 10 |
DOIs | |
Publication status | Published - 2011 |
Externally published | Yes |
Event | Advanced Inorganic Materials and Concepts for Photovoltaics - Symposium R at the E-MRS 2011 Spring Meeting - Nice, France Duration: 9 May 2011 → 13 May 2011 |
Bibliographical note
Copyright the Publisher 2011. Version archived for private and non-commercial use with the permission of the author/s and according to publisher conditions. For further rights please contact the publisher.Keywords
- Si nanocrystal
- SiC matrix
- hybrid structure
- superlattice structure