A ultra-thin silicon nitride barrier layer implementation for silicon quantum dots in amorphous silicon carbide matrix in photovoltaic application

Zhenyu Wan*, Shujuan Huang, Martin Green, Gavin Conibeer

*Corresponding author for this work

Research output: Contribution to journalConference paperpeer-review

1 Citation (Scopus)
17 Downloads (Pure)

Abstract

To search a suitable material candidate for "all-Si" tandem solar cell, a hybrid super-lattice structure consisting 30 periods of alternating amorphous Si0.7 C0.3 (5nm) layers and ultra-thin Si3N4 barrier layers (0.2-2.0nm) has been deposited by magnetron sputtering with subsequent annealing by a rapid thermal annealing (RTA) process. Structural and electrical characterization of the layered film was carried out after annealing. 8nm barrier layer thickness is proven to be able to provide sufficient structural confinement even after high temperature annealing. Increased resistivity was measured for the overall multi-layer structure, resulting from the incorporation of the Si3N4 barrier layers hence likely suppressing carrier transport and further electron hopping is proven the main transportation mechanism.

Original languageEnglish
Pages (from-to)271-281
Number of pages11
JournalEnergy Procedia
Volume10
DOIs
Publication statusPublished - 2011
Externally publishedYes
EventAdvanced Inorganic Materials and Concepts for Photovoltaics - Symposium R at the E-MRS 2011 Spring Meeting - Nice, France
Duration: 9 May 201113 May 2011

Bibliographical note

Copyright the Publisher 2011. Version archived for private and non-commercial use with the permission of the author/s and according to publisher conditions. For further rights please contact the publisher.

Keywords

  • Si nanocrystal
  • SiC matrix
  • hybrid structure
  • superlattice structure

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