Ablation threshold and etch rate measurements in high-speed ultraviolet (uv) micro-machining of polymers with uv-copper vapour lasers

ACJ Glover, Elizabeth Illy, Michael Withford, Jim Piper

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Original languageEnglish
Title of host publicationICALEO'95 - proceedings of the laser materials processing conference
EditorsJ Mazumder, A Matsunawa, C Magnusson
PublisherLaser Inst of America
Pages361-370
Number of pages10
ISBN (Print)0912035536
Publication statusPublished - 1995
EventLaser Materials Processing Conference (ICALEO 95) - SAN DIEGO, Canada
Duration: 13 Nov 199516 Nov 1995

Publication series

NamePROCEEDINGS OF THE LASER INSTITUTE OF AMERICA
PublisherLASER INST AMERICA
Volume80

Conference

ConferenceLaser Materials Processing Conference (ICALEO 95)
CountryCanada
CitySAN DIEGO
Period13/11/9516/11/95

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