Ablation threshold and etch rate measurements in high-speed ultraviolet (uv) micro-machining of polymers with uv-copper vapour lasers

ACJ Glover; Elizabeth Illy; Michael Withford; Jim Piper

Ablation threshold and etch rate measurements in high-speed ultraviolet (uv) micro-machining of polymers with uv-copper vapour lasers

ACJ Glover, Elizabeth Illy, Michael Withford, Jim Piper

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Original language	English
Title of host publication	ICALEO'95 - proceedings of the laser materials processing conference
Editors	J Mazumder, A Matsunawa, C Magnusson
Publisher	Laser Inst of America
Pages	361-370
Number of pages	10
ISBN (Print)	0912035536
Publication status	Published - 1995
Event	Laser Materials Processing Conference (ICALEO 95) - SAN DIEGO, Canada Duration: 13 Nov 1995 → 16 Nov 1995

Publication series

Name	PROCEEDINGS OF THE LASER INSTITUTE OF AMERICA
Publisher	LASER INST AMERICA
Volume	80

Conference

Conference	Laser Materials Processing Conference (ICALEO 95)
Country/Territory	Canada
City	SAN DIEGO
Period	13/11/95 → 16/11/95

Cite this

Glover, ACJ., Illy, E., Withford, M., & Piper, J. (1995). Ablation threshold and etch rate measurements in high-speed ultraviolet (uv) micro-machining of polymers with uv-copper vapour lasers. In J. Mazumder, A. Matsunawa, & C. Magnusson (Eds.), ICALEO'95 - proceedings of the laser materials processing conference (pp. 361-370). (PROCEEDINGS OF THE LASER INSTITUTE OF AMERICA; Vol. 80). Laser Inst of America.

Glover, ACJ ; Illy, Elizabeth ; Withford, Michael et al. / Ablation threshold and etch rate measurements in high-speed ultraviolet (uv) micro-machining of polymers with uv-copper vapour lasers. ICALEO'95 - proceedings of the laser materials processing conference. editor / J Mazumder ; A Matsunawa ; C Magnusson. Laser Inst of America, 1995. pp. 361-370 (PROCEEDINGS OF THE LASER INSTITUTE OF AMERICA).

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title = "Ablation threshold and etch rate measurements in high-speed ultraviolet (uv) micro-machining of polymers with uv-copper vapour lasers",

author = "ACJ Glover and Elizabeth Illy and Michael Withford and Jim Piper",

year = "1995",

language = "English",

isbn = "0912035536",

series = "PROCEEDINGS OF THE LASER INSTITUTE OF AMERICA",

publisher = "Laser Inst of America",

pages = "361--370",

editor = "J Mazumder and A Matsunawa and C Magnusson",

booktitle = "ICALEO'95 - proceedings of the laser materials processing conference",

note = "Laser Materials Processing Conference (ICALEO 95) ; Conference date: 13-11-1995 Through 16-11-1995",

}

Glover, ACJ, Illy, E, Withford, M & Piper, J 1995, Ablation threshold and etch rate measurements in high-speed ultraviolet (uv) micro-machining of polymers with uv-copper vapour lasers. in J Mazumder, A Matsunawa & C Magnusson (eds), ICALEO'95 - proceedings of the laser materials processing conference. PROCEEDINGS OF THE LASER INSTITUTE OF AMERICA, vol. 80, Laser Inst of America, pp. 361-370, Laser Materials Processing Conference (ICALEO 95), SAN DIEGO, Canada, 13/11/95.

Ablation threshold and etch rate measurements in high-speed ultraviolet (uv) micro-machining of polymers with uv-copper vapour lasers. / Glover, ACJ; Illy, Elizabeth; Withford, Michael et al.
ICALEO'95 - proceedings of the laser materials processing conference. ed. / J Mazumder; A Matsunawa; C Magnusson. Laser Inst of America, 1995. p. 361-370 (PROCEEDINGS OF THE LASER INSTITUTE OF AMERICA; Vol. 80).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - Ablation threshold and etch rate measurements in high-speed ultraviolet (uv) micro-machining of polymers with uv-copper vapour lasers

AU - Glover, ACJ

AU - Illy, Elizabeth

AU - Withford, Michael

AU - Piper, Jim

PY - 1995

Y1 - 1995

M3 - Conference proceeding contribution

SN - 0912035536

T3 - PROCEEDINGS OF THE LASER INSTITUTE OF AMERICA

SP - 361

EP - 370

BT - ICALEO'95 - proceedings of the laser materials processing conference

A2 - Mazumder, J

A2 - Matsunawa, A

A2 - Magnusson, C

PB - Laser Inst of America

T2 - Laser Materials Processing Conference (ICALEO 95)

Y2 - 13 November 1995 through 16 November 1995

ER -

Glover ACJ, Illy E, Withford M, Piper J. Ablation threshold and etch rate measurements in high-speed ultraviolet (uv) micro-machining of polymers with uv-copper vapour lasers. In Mazumder J, Matsunawa A, Magnusson C, editors, ICALEO'95 - proceedings of the laser materials processing conference. Laser Inst of America. 1995. p. 361-370. (PROCEEDINGS OF THE LASER INSTITUTE OF AMERICA).