TY - JOUR
T1 - Advances in MEMS and microfluidics-based energy harvesting technologies
AU - Mahmud, M. A. Parvez
AU - Bazaz, Sajad Razavi
AU - Dabiri, Soroush
AU - Mehrizi, Ali Abouei
AU - Asadnia, Mohsen
AU - Warkiani, Majid Ebrahimi
AU - Wang, Zhong Lin
PY - 2022/7
Y1 - 2022/7
N2 - Energy harvesting from mechanical vibrations, thermal gradients, electromagnetic radiations, and solar radiations has experienced rapid progress in recent times not only to develop an alternative power source that can replace conventional batteries to energize portable and personal electronics smartly but also to achieve sustainable self-sufficient micro/nanosystems. Utilizing micro-electromechanical system (MEMS) and microfluidics technologies through selective designs and fabrications effectively, those energy harvesters can be considerably downsized while ensuring a stable, portable, and consistent power supply. Although ambient energy sources such as solar radiation are harvested for decades, recent developments have enabled ambient vibrations, electromagnetic radiation, and heat to be harvested wirelessly, independently, and sustainably. Developments in the field of microfluidics have also led to the design and fabrication of novel energy harvesting devices. This paper reviews the recent advancements in energy harvesting technologies such as piezoelectric, electromagnetic, electrostatic, thermoelectric, radio frequency, and solar to drive self-powered portable electronics. Moreover, the potential application of MEMS and microfluidics as well as MEMS-based structures and fabrication techniques for energy harvesting are summarized and presented. Finally, a few crucial challenges affecting the performance of energy harvesters are addressed.
AB - Energy harvesting from mechanical vibrations, thermal gradients, electromagnetic radiations, and solar radiations has experienced rapid progress in recent times not only to develop an alternative power source that can replace conventional batteries to energize portable and personal electronics smartly but also to achieve sustainable self-sufficient micro/nanosystems. Utilizing micro-electromechanical system (MEMS) and microfluidics technologies through selective designs and fabrications effectively, those energy harvesters can be considerably downsized while ensuring a stable, portable, and consistent power supply. Although ambient energy sources such as solar radiation are harvested for decades, recent developments have enabled ambient vibrations, electromagnetic radiation, and heat to be harvested wirelessly, independently, and sustainably. Developments in the field of microfluidics have also led to the design and fabrication of novel energy harvesting devices. This paper reviews the recent advancements in energy harvesting technologies such as piezoelectric, electromagnetic, electrostatic, thermoelectric, radio frequency, and solar to drive self-powered portable electronics. Moreover, the potential application of MEMS and microfluidics as well as MEMS-based structures and fabrication techniques for energy harvesting are summarized and presented. Finally, a few crucial challenges affecting the performance of energy harvesters are addressed.
KW - energy harvesting
KW - MEMS
KW - micro/nanosystems
KW - microfluidics
UR - http://www.scopus.com/inward/record.url?scp=85124552321&partnerID=8YFLogxK
U2 - 10.1002/admt.202101347
DO - 10.1002/admt.202101347
M3 - Review article
AN - SCOPUS:85124552321
SN - 2365-709X
VL - 7
SP - 1
EP - 30
JO - Advanced Materials Technologies
JF - Advanced Materials Technologies
IS - 7
M1 - 2101347
ER -