Advances in the calibration of atom probe tomographic reconstruction

Baptiste Gault*, Michael P. Moody, Frederic De Geuser, Guy Tsafnat, Alexandre La Fontaine, Leigh T. Stephenson, Daniel Haley, Simon P. Ringer

*Corresponding author for this work

Research output: Contribution to journalArticle

142 Citations (Scopus)

Abstract

Modern wide field-of-view atom probes permit observation of a wide range of crystallographic features that can be used to calibrate the tomographic reconstruction of the analyzed volume. In this study, methodologies to determine values of the geometric parameters involved in the tomographic reconstruction of atom probe data sets are presented and discussed. The influence of the tip to electrode distance and specimen temperature on these parameters is explored. Significantly, their influence is demonstrated to be very limited, indicating a relatively wide regime of experimental parameters space for sound atom probe tomography (APT) experiments. These methods have been used on several specimens and material types, and the results indicate that the reconstruction parameters are specific to each specimen. Finally, it is shown how an accurate calibration of the reconstruction enables improvements to the quality and reliability of the microscopy and microanalysis capabilities of the atom probe.

Original languageEnglish
Article number034913
Pages (from-to)1-10
Number of pages10
JournalJournal of Applied Physics
Volume105
Issue number3
DOIs
Publication statusPublished - 2009
Externally publishedYes

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