Atomic layer deposition of thin films of ZnSe - Structural and optical characterization

E. Guziewicz; M. Godlewski; K. Kopalko; E. Łusakowska; E. Dynowska; M. Guziewicz; M. M. Godlewski; M. Phillips

doi:10.1016/j.tsf.2003.09.041

Atomic layer deposition of thin films of ZnSe - Structural and optical characterization

E. Guziewicz^*, M. Godlewski, K. Kopalko, E. Łusakowska, E. Dynowska, M. Guziewicz, M. M. Godlewski, M. Phillips

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

Thin films of sphalerite-type ZnSe were grown by atomic layer deposition (ALD) from elemental Zn and Se precursors. These films, grown on various substrates, show bright blue 'edge' emission accompanied by donor-acceptor pair emissions in the blue, green and red spectral regions. Red, green and blue emissions mixed together give a white color, with a color temperature between 2400 and 4500 K depending on a layer thickness and temperature. ZnSe grown by ALD is in consequence a promising material for the fabrication of semiconductor-based white light emitting thin film electroluminescence displays.

Original language	English
Pages (from-to)	172-177
Number of pages	6
Journal	Thin Solid Films
Volume	446
Issue number	2
DOIs	https://doi.org/10.1016/j.tsf.2003.09.041
Publication status	Published - 15 Jan 2004

Keywords

Atomic layer deposition
Cathodoluminescence
Zinc selenide

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10.1016/j.tsf.2003.09.041

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title = "Atomic layer deposition of thin films of ZnSe - Structural and optical characterization",

abstract = "Thin films of sphalerite-type ZnSe were grown by atomic layer deposition (ALD) from elemental Zn and Se precursors. These films, grown on various substrates, show bright blue 'edge' emission accompanied by donor-acceptor pair emissions in the blue, green and red spectral regions. Red, green and blue emissions mixed together give a white color, with a color temperature between 2400 and 4500 K depending on a layer thickness and temperature. ZnSe grown by ALD is in consequence a promising material for the fabrication of semiconductor-based white light emitting thin film electroluminescence displays.",

keywords = "Atomic layer deposition, Cathodoluminescence, Zinc selenide",

author = "E. Guziewicz and M. Godlewski and K. Kopalko and E. {\L}usakowska and E. Dynowska and M. Guziewicz and Godlewski, {M. M.} and M. Phillips",

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T1 - Atomic layer deposition of thin films of ZnSe - Structural and optical characterization

AU - Guziewicz, E.

AU - Godlewski, M.

AU - Kopalko, K.

AU - Łusakowska, E.

AU - Dynowska, E.

AU - Guziewicz, M.

AU - Godlewski, M. M.

AU - Phillips, M.

PY - 2004/1/15

Y1 - 2004/1/15

N2 - Thin films of sphalerite-type ZnSe were grown by atomic layer deposition (ALD) from elemental Zn and Se precursors. These films, grown on various substrates, show bright blue 'edge' emission accompanied by donor-acceptor pair emissions in the blue, green and red spectral regions. Red, green and blue emissions mixed together give a white color, with a color temperature between 2400 and 4500 K depending on a layer thickness and temperature. ZnSe grown by ALD is in consequence a promising material for the fabrication of semiconductor-based white light emitting thin film electroluminescence displays.

AB - Thin films of sphalerite-type ZnSe were grown by atomic layer deposition (ALD) from elemental Zn and Se precursors. These films, grown on various substrates, show bright blue 'edge' emission accompanied by donor-acceptor pair emissions in the blue, green and red spectral regions. Red, green and blue emissions mixed together give a white color, with a color temperature between 2400 and 4500 K depending on a layer thickness and temperature. ZnSe grown by ALD is in consequence a promising material for the fabrication of semiconductor-based white light emitting thin film electroluminescence displays.

KW - Atomic layer deposition

KW - Cathodoluminescence

KW - Zinc selenide

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JO - Thin Solid Films

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Atomic layer deposition of thin films of ZnSe - Structural and optical characterization

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Keywords

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