Abstract
Fishes use their mechanosensory lateral-line system to detect minute disturbances underwater. The lateral-lines consist of superficial and canal neuromast (SN and CN) sensory sub-systems. Unlike SNs which are exposed to external flow directly, the CNs, due to the presence of canals, have a higher immunity to noise and greater signal selectivity. In this paper, we present the design, fabrication and experimental characterization of arrays of zero-powered and ultrasensitive MEMS piezoelectric hair cell sensors encapsulated into biomimetic canals. The experimental characterization of the MEMS canal encapsulated sensors in the presence of steady and unsteady flow conditions validates the biomechanical high-pass filtering function of the canals.
Original language | English |
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Article number | 7051001 |
Pages (from-to) | 500-503 |
Number of pages | 4 |
Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
Volume | 2015-February |
Issue number | February |
DOIs | |
Publication status | Published - 26 Feb 2015 |
Externally published | Yes |
Event | 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015) - Estoril, Portugal , Estoril Duration: 18 Jan 2015 → 22 Jan 2015 |