Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing

A. G P Kottapalli; M. Asadnia; J. M. Miao; M. S. Triantafyllou

doi:10.1109/Transducers.2013.6626932

Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing

A. G P Kottapalli, M. Asadnia, J. M. Miao, M. S. Triantafyllou

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

4 Citations (Scopus)

Abstract

This paper presents the fabrication and testing of a bio-inspired polymer MEMS flow sensor. The sensor consists of a liquid crystal polymer (LCP) sensing membrane and a polymer haircell that extends into the flow. High-aspect ratio Si60 polymer haircells are fabricated by stereolithography. The device demonstrates high sensitivity in the air and water flow velocity sensing tests that are conducted.

Original language	English
Title of host publication	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	976-979
Number of pages	4
ISBN (Print)	9781467359818
DOIs	https://doi.org/10.1109/Transducers.2013.6626932
Publication status	Published - 2013
Externally published	Yes
Event	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013

Other

Other	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13

Keywords

Bio-inspiration
haircell
liquid crystal polymer
polymer MEMS

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10.1109/Transducers.2013.6626932

Cite this

Kottapalli, A. G. P., Asadnia, M., Miao, J. M., & Triantafyllou, M. S. (2013). Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 976-979). [6626932] Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/Transducers.2013.6626932

Kottapalli, A. G P ; Asadnia, M. ; Miao, J. M. et al. / Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 2013. pp. 976-979

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title = "Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing",

abstract = "This paper presents the fabrication and testing of a bio-inspired polymer MEMS flow sensor. The sensor consists of a liquid crystal polymer (LCP) sensing membrane and a polymer haircell that extends into the flow. High-aspect ratio Si60 polymer haircells are fabricated by stereolithography. The device demonstrates high sensitivity in the air and water flow velocity sensing tests that are conducted.",

keywords = "Bio-inspiration, haircell, liquid crystal polymer, polymer MEMS",

author = "Kottapalli, {A. G P} and M. Asadnia and Miao, {J. M.} and Triantafyllou, {M. S.}",

year = "2013",

doi = "10.1109/Transducers.2013.6626932",

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publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

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note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

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Kottapalli, AGP, Asadnia, M, Miao, JM & Triantafyllou, MS 2013, Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6626932, Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 976-979, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6626932

Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing. / Kottapalli, A. G P; Asadnia, M.; Miao, J. M. et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE), 2013. p. 976-979 6626932.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

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AU - Kottapalli, A. G P

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AU - Triantafyllou, M. S.

PY - 2013

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AB - This paper presents the fabrication and testing of a bio-inspired polymer MEMS flow sensor. The sensor consists of a liquid crystal polymer (LCP) sensing membrane and a polymer haircell that extends into the flow. High-aspect ratio Si60 polymer haircells are fabricated by stereolithography. The device demonstrates high sensitivity in the air and water flow velocity sensing tests that are conducted.

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DO - 10.1109/Transducers.2013.6626932

M3 - Conference proceeding contribution

AN - SCOPUS:84891682561

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Kottapalli AGP, Asadnia M, Miao JM, Triantafyllou MS. Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE). 2013. p. 976-979. 6626932 doi: 10.1109/Transducers.2013.6626932

Biomimetic polymer MEMS haircells with high-aspect ratio for high accuracy flow sensing

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