Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer

Bozenko F. Oreb, David I. Farrant, Christopher J. Walsh, Greg Forbes, Philip S. Fairman

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    52 Citations (Scopus)


    A 300-mm-aperture digital phase-shifting Fizeau interferometer has been developed in-house for precision metrology of optical components fabricated by the optical workshop at Telecommunications and Industrial Physics, Commonwealth Scientific and Industrial Research Organization. We describe the procedures used in the calibration of the instrument. A reference data file representing the deviations from flatness of the reference surface is generated, measurement uncertainty estimated, and aberrations in the instrument assessed. Measurements on 250-mm-diameter uncoated optical surfaces have consistently shown short-term repeatability of 0.3-nm rms from measurement to measurement and allowed for absolute characterization of these surfaces to within a few nanometers.

    Original languageEnglish
    Pages (from-to)5161-5171
    Number of pages11
    JournalApplied Optics
    Issue number28
    Publication statusPublished - 1 Oct 2000


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