Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer

Bozenko F. Oreb; David I. Farrant; Christopher J. Walsh; Greg Forbes; Philip S. Fairman

doi:10.1364/AO.39.005161

Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer

Bozenko F. Oreb, David I. Farrant, Christopher J. Walsh, Greg Forbes, Philip S. Fairman

Research output: Contribution to journal › Article › peer-review

51 Citations (Scopus)

Abstract

A 300-mm-aperture digital phase-shifting Fizeau interferometer has been developed in-house for precision metrology of optical components fabricated by the optical workshop at Telecommunications and Industrial Physics, Commonwealth Scientific and Industrial Research Organization. We describe the procedures used in the calibration of the instrument. A reference data file representing the deviations from flatness of the reference surface is generated, measurement uncertainty estimated, and aberrations in the instrument assessed. Measurements on 250-mm-diameter uncoated optical surfaces have consistently shown short-term repeatability of 0.3-nm rms from measurement to measurement and allowed for absolute characterization of these surfaces to within a few nanometers.

Original language	English
Pages (from-to)	5161-5171
Number of pages	11
Journal	Applied Optics
Volume	39
Issue number	28
DOIs	https://doi.org/10.1364/AO.39.005161
Publication status	Published - 1 Oct 2000

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Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer

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