Characterization of three-dimensional microstructures in single-crystal diamond

P. Olivero*, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, Andrew D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, S. Prawer

*Corresponding author for this work

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77 Citations (Scopus)

Abstract

We report on the Raman and photoluminescence characterization of three-dimensional microstructures fabricated in single crystal diamond with a Focused Ion Beam (FIB) assisted lift-off technique. The fabrication method is based on MeV ion implantation, followed by FIB micropatterning and selective chemical etching. In a previous publication we reported on the fabrication of a micro-bridge structure exhibiting waveguiding behavior [P. Olivero, S. Rubanov, P. Reichart, B. Gibson, S. Huntington, J. Rabeau, Andrew D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, S. Prawer, Adv. Mater., 17 (20) (2005) 2427]. In the present work, Raman and photoluminescence spectroscopies are employed to characterize the structural quality of such microstructures, particularly as regards the removal of residual damage created during the machining process. Three-dimensional microstructures in high quality single crystal diamond have many applications, ranging from integrated quantum-optical devices to micro-electromechanical assemblies.

Original languageEnglish
Pages (from-to)1614-1621
Number of pages8
JournalDiamond and Related Materials
Volume15
Issue number10
DOIs
Publication statusPublished - Oct 2006
Externally publishedYes

Keywords

  • Diamond crystal
  • Micro electromechanical systems (MEMS)
  • Micro-optics
  • Optical properties characterization

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