TY - JOUR
T1 - Characterization of three-dimensional microstructures in single-crystal diamond
AU - Olivero, P.
AU - Rubanov, S.
AU - Reichart, P.
AU - Gibson, B. C.
AU - Huntington, S. T.
AU - Rabeau, J. R.
AU - Greentree, Andrew D.
AU - Salzman, J.
AU - Moore, D.
AU - Jamieson, D. N.
AU - Prawer, S.
PY - 2006/10
Y1 - 2006/10
N2 - We report on the Raman and photoluminescence characterization of three-dimensional microstructures fabricated in single crystal diamond with a Focused Ion Beam (FIB) assisted lift-off technique. The fabrication method is based on MeV ion implantation, followed by FIB micropatterning and selective chemical etching. In a previous publication we reported on the fabrication of a micro-bridge structure exhibiting waveguiding behavior [P. Olivero, S. Rubanov, P. Reichart, B. Gibson, S. Huntington, J. Rabeau, Andrew D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, S. Prawer, Adv. Mater., 17 (20) (2005) 2427]. In the present work, Raman and photoluminescence spectroscopies are employed to characterize the structural quality of such microstructures, particularly as regards the removal of residual damage created during the machining process. Three-dimensional microstructures in high quality single crystal diamond have many applications, ranging from integrated quantum-optical devices to micro-electromechanical assemblies.
AB - We report on the Raman and photoluminescence characterization of three-dimensional microstructures fabricated in single crystal diamond with a Focused Ion Beam (FIB) assisted lift-off technique. The fabrication method is based on MeV ion implantation, followed by FIB micropatterning and selective chemical etching. In a previous publication we reported on the fabrication of a micro-bridge structure exhibiting waveguiding behavior [P. Olivero, S. Rubanov, P. Reichart, B. Gibson, S. Huntington, J. Rabeau, Andrew D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, S. Prawer, Adv. Mater., 17 (20) (2005) 2427]. In the present work, Raman and photoluminescence spectroscopies are employed to characterize the structural quality of such microstructures, particularly as regards the removal of residual damage created during the machining process. Three-dimensional microstructures in high quality single crystal diamond have many applications, ranging from integrated quantum-optical devices to micro-electromechanical assemblies.
KW - Diamond crystal
KW - Micro electromechanical systems (MEMS)
KW - Micro-optics
KW - Optical properties characterization
UR - http://www.scopus.com/inward/record.url?scp=33748801532&partnerID=8YFLogxK
U2 - 10.1016/j.diamond.2006.01.018
DO - 10.1016/j.diamond.2006.01.018
M3 - Article
AN - SCOPUS:33748801532
SN - 0925-9635
VL - 15
SP - 1614
EP - 1621
JO - Diamond and Related Materials
JF - Diamond and Related Materials
IS - 10
ER -