Chirped-pulse oscillators for micro- and nanomachining applications

A. Fuerbach*, A. Isemann, A. Assion, A. Fernandez, R. Graf, A. Apolonski

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

    Abstract

    For the first time we demonstrate laser processing of a wide variety of materials with a resolution approaching the nanometer range, using a commercially available chirped-pulse oscillator. This source ensures both, a superior quality of the ablation and a high throughput using a relatively simple laser system.

    Original languageEnglish
    Title of host publicationPICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics, Conference Proceedings
    EditorsMilan Brandt, Erol Harvey
    Place of PublicationOrlando, FL
    PublisherLaser Institute of America
    Pages367-370
    Number of pages4
    ISBN (Print)0912035846, 9780912035840
    Publication statusPublished - 2006
    EventPICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics - Melbourne, VIC, Australia
    Duration: 3 Apr 20065 Apr 2006

    Other

    OtherPICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics
    Country/TerritoryAustralia
    CityMelbourne, VIC
    Period3/04/065/04/06

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