Chirped-pulse oscillators repair photomasks

Alexander Fuerbach*, Andreas Stingl, Mary Essary

*Corresponding author for this work

Research output: Contribution to Newspaper/Magazine/WebsiteArticle

1 Citation (Scopus)

Abstract

The features of chirped-pulse oscillators (CPO), which are used for repairing photomasks, is discussed. CPO consists of a standard Kerr-lens modelocked femtosecond oscillator and is pumped by a single continuous-wave Nd:YVO 4 laser. CPO works in the positive-dispersion regime, and thus the pulse duration is stretched to picoseconds inside of the cavity. A spectral width of more than 50 nm FWHM (full width at half maximum) centered at 800 nm is generated as result of high intracavity pulse energy and the dispersion is controlled over a bandwidth of more than 100 nm by the use of dispersive mirrors (DMs).

Original languageEnglish
Pages135-140
Number of pages6
Volume40
No.6
Specialist publicationLaser Focus World
Publication statusPublished - Jun 2004
Externally publishedYes

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