Abstract
Glass bonding is often necessary in microfluidic, nanofluidic and MEMS applications. Fusion bonding is a popular method in which glass substrates are permanently bonded using chemical treatment, low pressure and annealing. This project investigates a range of bonding methods and measures the bond strength. Float glass substrates were chemically cleaned and prepared using four different methods (Ethanol Rub, Ethanol Rub + NH4OH, piranha + NH4OH, and piranha + HCl + NH4OH), pressed together by hand, and placed in the oven at 400 °C for 10 h. Bond strength was assessed using compressive shear stress. It was determined that the piranha + HCl +NH4OH produced the strongest bond. All methods produced satisfactory bonds and the simplicity and safety of a simple Ethanol rub means it should be considered whenever possible.
Original language | English |
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Article number | 085201 |
Pages (from-to) | 1-6 |
Number of pages | 6 |
Journal | Materials Research Express |
Volume | 5 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2018 |
Keywords
- fusion bond
- glass
- bonding
- microfabrication