Comparing fusion bonding methods for glass substrates

Timo Mayer, Aleksei N. Marianov, David W. Inglis

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

Glass bonding is often necessary in microfluidic, nanofluidic and MEMS applications. Fusion bonding is a popular method in which glass substrates are permanently bonded using chemical treatment, low pressure and annealing. This project investigates a range of bonding methods and measures the bond strength. Float glass substrates were chemically cleaned and prepared using four different methods (Ethanol Rub, Ethanol Rub + NH4OH, piranha + NH4OH, and piranha + HCl + NH4OH), pressed together by hand, and placed in the oven at 400 °C for 10 h. Bond strength was assessed using compressive shear stress. It was determined that the piranha + HCl +NH4OH produced the strongest bond. All methods produced satisfactory bonds and the simplicity and safety of a simple Ethanol rub means it should be considered whenever possible.

Original languageEnglish
Article number085201
Pages (from-to)1-6
Number of pages6
JournalMaterials Research Express
Volume5
Issue number8
DOIs
Publication statusPublished - 2018

Keywords

  • fusion bond
  • glass
  • bonding
  • microfabrication

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