Comparison of front and back laser irradiation in laser cleaning of silica particles from silica glass

Adam M. Joyce, Deborah M. Kane

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

Laser cleaning of micron and sub-micron particles from various substrates such as silicon wafers and glass has been an active area of research in laser processing [1]. Both understanding the fundamental physics of the light/particle/surface interaction and the development of successful cleaning protocols for industrial application have been drivers. It has been observed that directing the laser beam through a semi-transparent or transparent sample can give a higher laser cleaning efficiency for a given laser fluence than does front laser irradiation [2]. In this work we present new comparative experimental results of "front and back" laser cleaning of silica particles from silica and glass substrates. Also, a comparison is made of the optical damage that occurs at higher laser fluences, beyond the damage free laser cleaning limit, for both.

Original languageEnglish
Title of host publicationPICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics, Conference Proceedings
EditorsMilan Brandt, Erol Harvey
Place of PublicationOrlando, FL
PublisherLaser Institute of America
Pages299-304
Number of pages6
ISBN (Print)0912035846, 9780912035840
Publication statusPublished - Apr 2006
EventPICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics - Melbourne, VIC, Australia
Duration: 3 Apr 20065 Apr 2006

Other

OtherPICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics
CountryAustralia
CityMelbourne, VIC
Period3/04/065/04/06

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