Abstract
Laser cleaning of micron and sub-micron particles from various substrates such as silicon wafers and glass has been an active area of research in laser processing [1]. Both understanding the fundamental physics of the light/particle/surface interaction and the development of successful cleaning protocols for industrial application have been drivers. It has been observed that directing the laser beam through a semi-transparent or transparent sample can give a higher laser cleaning efficiency for a given laser fluence than does front laser irradiation [2]. In this work we present new comparative experimental results of "front and back" laser cleaning of silica particles from silica and glass substrates. Also, a comparison is made of the optical damage that occurs at higher laser fluences, beyond the damage free laser cleaning limit, for both.
| Original language | English |
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| Title of host publication | PICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics, Conference Proceedings |
| Editors | Milan Brandt, Erol Harvey |
| Place of Publication | Orlando, FL |
| Publisher | Laser Institute of America |
| Pages | 299-304 |
| Number of pages | 6 |
| ISBN (Print) | 0912035846, 9780912035840 |
| Publication status | Published - Apr 2006 |
| Event | PICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics - Melbourne, VIC, Australia Duration: 3 Apr 2006 → 5 Apr 2006 |
Other
| Other | PICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics |
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| Country/Territory | Australia |
| City | Melbourne, VIC |
| Period | 3/04/06 → 5/04/06 |