Original language | English |
---|---|
Pages (from-to) | 6405-6408 |
Number of pages | 4 |
Journal | Surface and Coatings Technology |
Volume | 200 |
Issue number | 22-23 |
DOIs | |
Publication status | Published - 2006 |
Externally published | Yes |
Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation
Thang Cao Ha, David McKenzie, M M M Bilek, E D Doyle, P K Chu
Research output: Contribution to journal › Article › peer-review
16
Citations
(Scopus)