Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation

Thang Cao Ha, David McKenzie, M M M Bilek, E D Doyle, P K Chu

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)6405-6408
Number of pages4
JournalSurface and Coatings Technology
Issue number22-23
Publication statusPublished - 2006
Externally publishedYes

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