Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation

Thang Cao Ha; David McKenzie; M M M Bilek; E D Doyle; P K Chu

doi:10.1016/j.surfcoat.2005.11.011

Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation

Thang Cao Ha, David McKenzie, M M M Bilek, E D Doyle, P K Chu

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	6405-6408
Number of pages	4
Journal	Surface and Coatings Technology
Volume	200
Issue number	22-23
DOIs	https://doi.org/10.1016/j.surfcoat.2005.11.011
Publication status	Published - 2006
Externally published	Yes

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10.1016/j.surfcoat.2005.11.011

Cite this

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title = "Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation",

author = "Ha, {Thang Cao} and David McKenzie and Bilek, {M M M} and Doyle, {E D} and Chu, {P K}",

year = "2006",

doi = "10.1016/j.surfcoat.2005.11.011",

language = "English",

volume = "200",

pages = "6405--6408",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier",

number = "22-23",

}

TY - JOUR

T1 - Control of stress and delamination in single and multi-layer carbon thin films prepared by cathodic arc and RF plasma deposition and implantation

AU - Ha, Thang Cao

AU - McKenzie, David

AU - Bilek, M M M

AU - Doyle, E D

AU - Chu, P K

PY - 2006

Y1 - 2006

U2 - 10.1016/j.surfcoat.2005.11.011

DO - 10.1016/j.surfcoat.2005.11.011

M3 - Article

VL - 200

SP - 6405

EP - 6408

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 22-23

ER -