Abstract
Heavy ion elastic recoil detection has been applied to the compositional analysis of polycrystalline GaN films developed for potential, cost-effective use in optoelectronics. Film stoichiometries could be determined to high precision. The films contain significant amounts of oxygen, carbon and hydrogen. AFM microscopy and XRD measurements show that the oxygen content correlates with crystal size. The results are consistent with the preferential incorporation of oxygen at the grain boundaries.
Original language | English |
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Title of host publication | ANA 2001 - Fourth Conference on Nulcear Science and Engineering in Australia |
Editors | Clarence J. Hardy |
Place of Publication | Sutherland Australia |
Publisher | The Australian Nucelar Association |
Pages | 131-134 |
Number of pages | 4 |
Publication status | Published - 2001 |
Event | Fourth Conference on Nuclear Science and Engineering in Australia - Sydney Duration: 24 Oct 2001 → 25 Oct 2001 |
Conference
Conference | Fourth Conference on Nuclear Science and Engineering in Australia |
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City | Sydney |
Period | 24/10/01 → 25/10/01 |