Creation of adhesion resistant silica glass surfaces with ultraviolet laser cleaning

D. R. Halfpenny*, D. M. Kane, R. N. Lamb, B. Gong

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

    5 Citations (Scopus)

    Abstract

    By using the ultraviolet irradiation from a frequency doubled copper vapour laser, in the fluence range used for laser cleaning, the surface chemistry of silica can be modified. Analysis has shown that the surface is dehydroxylated by the UV light changing it from hydrophilic to hydrophobic in nature. The modification of the surface has the effect of reducing the number of particles that adhere to the treated surface by up to 80%, for 0.3 μm diameter particles, upon subsequent contamination of the surface.

    Original languageEnglish
    Title of host publicationConference on Optoelectronic & Microelectronic Materials and Devices, Proceedings, COMMAD
    Place of PublicationPiscataway, NJ
    PublisherInstitute of Electrical and Electronics Engineers (IEEE)
    Pages470-473
    Number of pages4
    DOIs
    Publication statusPublished - 1996
    EventProceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD - Canberra, Aust
    Duration: 8 Dec 199611 Dec 1996

    Other

    OtherProceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD
    CityCanberra, Aust
    Period8/12/9611/12/96

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