Abstract
By using the ultraviolet irradiation from a frequency doubled copper vapour laser, in the fluence range used for laser cleaning, the surface chemistry of silica can be modified. Analysis has shown that the surface is dehydroxylated by the UV light changing it from hydrophilic to hydrophobic in nature. The modification of the surface has the effect of reducing the number of particles that adhere to the treated surface by up to 80%, for 0.3 μm diameter particles, upon subsequent contamination of the surface.
Original language | English |
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Title of host publication | Conference on Optoelectronic & Microelectronic Materials and Devices, Proceedings, COMMAD |
Place of Publication | Piscataway, NJ |
Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
Pages | 470-473 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 1996 |
Event | Proceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD - Canberra, Aust Duration: 8 Dec 1996 → 11 Dec 1996 |
Other
Other | Proceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD |
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City | Canberra, Aust |
Period | 8/12/96 → 11/12/96 |