Design and simulation of a low-actuation-voltage MEMS switch

Yasser Mafinejad; Abbas Z. Kouzani; Ladislau Matekovits

doi:10.4108/eai.28-9-2015.2261432

Design and simulation of a low-actuation-voltage MEMS switch

Yasser Mafinejad, Abbas Z. Kouzani, Ladislau Matekovits

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Abstract

This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt switch which has a very large bandwidth (4 GHz to 24 GHz). In this work, the isolation of MEMS switch is improved by adding two short high impedance transmission lines at the beginning and end of a coplanar waveguide (CPW). Simulating the switch demonstrates that a return loss (S11) is less than -26 dB for the entire frequency band, and perfect matching at 20 GHz in upstate position. A ramp dual pulse driver is also designed for reducing the capacitive charge injection for considering the reliability of the switch. The simulation results show that the shifting of voltage due to the capacitive charge is reduced by more than 35% of the initial value. Finally, the dynamic behavior of the MEMS switch is simulated by modal analysis and using CoventorWare to calculate the natural frequencies of the switch and its mode shapes. The switching ON and OFF time are 4.48 and 2.43 μs, respectively, with an actuation voltage of less than 15 V.

Original language	English
Article number	e3
Number of pages	7
Journal	EAI Endorsed Transactions on Energy Web
Volume	16
Issue number	9
DOIs	https://doi.org/10.4108/eai.28-9-2015.2261432
Publication status	Published - 2016
Externally published	Yes
Event	International Conference on Body Area Networks (10th : 2015) - Sydney Duration: 28 Sept 2015 → 30 Sept 2015

Bibliographical note

Version archived for private and non-commercial use with the permission of the author/s and according to publisher conditions. For further rights please contact the publisher.

Keywords

RF MEMS
switch
low-actuation-voltage
capacitive
shunt

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10.4108/eai.28-9-2015.2261432

Publisher version (open access)Final published version, 754 KBLicence: CC BY

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title = "Design and simulation of a low-actuation-voltage MEMS switch",

abstract = "This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt switch which has a very large bandwidth (4 GHz to 24 GHz). In this work, the isolation of MEMS switch is improved by adding two short high impedance transmission lines at the beginning and end of a coplanar waveguide (CPW). Simulating the switch demonstrates that a return loss (S11) is less than -26 dB for the entire frequency band, and perfect matching at 20 GHz in upstate position. A ramp dual pulse driver is also designed for reducing the capacitive charge injection for considering the reliability of the switch. The simulation results show that the shifting of voltage due to the capacitive charge is reduced by more than 35% of the initial value. Finally, the dynamic behavior of the MEMS switch is simulated by modal analysis and using CoventorWare to calculate the natural frequencies of the switch and its mode shapes. The switching ON and OFF time are 4.48 and 2.43 μs, respectively, with an actuation voltage of less than 15 V.",

keywords = "RF MEMS, switch, low-actuation-voltage, capacitive, shunt",

author = "Yasser Mafinejad and Kouzani, {Abbas Z.} and Ladislau Matekovits",

note = "Version archived for private and non-commercial use with the permission of the author/s and according to publisher conditions. For further rights please contact the publisher.; International Conference on Body Area Networks (10th : 2015) ; Conference date: 28-09-2015 Through 30-09-2015",

year = "2016",

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T1 - Design and simulation of a low-actuation-voltage MEMS switch

AU - Mafinejad, Yasser

AU - Kouzani, Abbas Z.

AU - Matekovits, Ladislau

N1 - Version archived for private and non-commercial use with the permission of the author/s and according to publisher conditions. For further rights please contact the publisher.

PY - 2016

Y1 - 2016

N2 - This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt switch which has a very large bandwidth (4 GHz to 24 GHz). In this work, the isolation of MEMS switch is improved by adding two short high impedance transmission lines at the beginning and end of a coplanar waveguide (CPW). Simulating the switch demonstrates that a return loss (S11) is less than -26 dB for the entire frequency band, and perfect matching at 20 GHz in upstate position. A ramp dual pulse driver is also designed for reducing the capacitive charge injection for considering the reliability of the switch. The simulation results show that the shifting of voltage due to the capacitive charge is reduced by more than 35% of the initial value. Finally, the dynamic behavior of the MEMS switch is simulated by modal analysis and using CoventorWare to calculate the natural frequencies of the switch and its mode shapes. The switching ON and OFF time are 4.48 and 2.43 μs, respectively, with an actuation voltage of less than 15 V.

AB - This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt switch which has a very large bandwidth (4 GHz to 24 GHz). In this work, the isolation of MEMS switch is improved by adding two short high impedance transmission lines at the beginning and end of a coplanar waveguide (CPW). Simulating the switch demonstrates that a return loss (S11) is less than -26 dB for the entire frequency band, and perfect matching at 20 GHz in upstate position. A ramp dual pulse driver is also designed for reducing the capacitive charge injection for considering the reliability of the switch. The simulation results show that the shifting of voltage due to the capacitive charge is reduced by more than 35% of the initial value. Finally, the dynamic behavior of the MEMS switch is simulated by modal analysis and using CoventorWare to calculate the natural frequencies of the switch and its mode shapes. The switching ON and OFF time are 4.48 and 2.43 μs, respectively, with an actuation voltage of less than 15 V.

KW - RF MEMS

KW - switch

KW - low-actuation-voltage

KW - capacitive

KW - shunt

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DO - 10.4108/eai.28-9-2015.2261432

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VL - 16

JO - EAI Endorsed Transactions on Energy Web

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T2 - International Conference on Body Area Networks (10th : 2015)

Y2 - 28 September 2015 through 30 September 2015

ER -

Design and simulation of a low-actuation-voltage MEMS switch

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