Development of high-power vacuum-ultraviolet light sources for materials processing applications

Research output: Contribution to conferenceAbstractResearch

Workshop

WorkshopThe Fourth Asia-Pacific Light Sources Workshop (APLSW) 2011
CityDepartment of Optics and Photonics, National Central University, Taiwan
Period13/04/1114/04/11

Cite this

Carman, R., & Kane, D. M. (2011). Development of high-power vacuum-ultraviolet light sources for materials processing applications. 22-23. Abstract from The Fourth Asia-Pacific Light Sources Workshop (APLSW) 2011, Department of Optics and Photonics, National Central University, Taiwan, .
Carman, Robert ; Kane, Deborah M. / Development of high-power vacuum-ultraviolet light sources for materials processing applications. Abstract from The Fourth Asia-Pacific Light Sources Workshop (APLSW) 2011, Department of Optics and Photonics, National Central University, Taiwan, .2 p.
@conference{09e3f912497a413a9146031c1437e55b,
title = "Development of high-power vacuum-ultraviolet light sources for materials processing applications",
author = "Robert Carman and Kane, {Deborah M.}",
year = "2011",
language = "English",
pages = "22--23",
note = "The Fourth Asia-Pacific Light Sources Workshop (APLSW) 2011 ; Conference date: 13-04-2011 Through 14-04-2011",

}

Carman, R & Kane, DM 2011, 'Development of high-power vacuum-ultraviolet light sources for materials processing applications' The Fourth Asia-Pacific Light Sources Workshop (APLSW) 2011, Department of Optics and Photonics, National Central University, Taiwan, 13/04/11 - 14/04/11, pp. 22-23.

Development of high-power vacuum-ultraviolet light sources for materials processing applications. / Carman, Robert; Kane, Deborah M.

2011. 22-23 Abstract from The Fourth Asia-Pacific Light Sources Workshop (APLSW) 2011, Department of Optics and Photonics, National Central University, Taiwan, .

Research output: Contribution to conferenceAbstractResearch

TY - CONF

T1 - Development of high-power vacuum-ultraviolet light sources for materials processing applications

AU - Carman, Robert

AU - Kane, Deborah M.

PY - 2011

Y1 - 2011

M3 - Abstract

SP - 22

EP - 23

ER -

Carman R, Kane DM. Development of high-power vacuum-ultraviolet light sources for materials processing applications. 2011. Abstract from The Fourth Asia-Pacific Light Sources Workshop (APLSW) 2011, Department of Optics and Photonics, National Central University, Taiwan, .