Development of incoherent EUV/VUV light sources: tailoring the output pulse characteristics for materials processing applications

R. J. Carman; B. K. Ward; D. M. Kane

doi:10.1109/ICONN.2010.6045263

Development of incoherent EUV/VUV light sources: tailoring the output pulse characteristics for materials processing applications

R. J. Carman^*, B. K. Ward, D. M. Kane

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

The temporal characteristics of the output pulses generated by an excimer-based incoherent light source operating in the deep ultraviolet between 80nm160nm have been investigated in detail. Generation of output pulses with the highest peak powers, shortest durations (FWHM) and fastest leading-edge risetimes, occurred at the highest operating pressure studied (900mbar).

Original language	English
Title of host publication	2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010)
Place of Publication	Piscataway, N.J.
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	362-364
Number of pages	3
ISBN (Electronic)	9781424452620, 9781424452620
ISBN (Print)	9781424452613
DOIs	https://doi.org/10.1109/ICONN.2010.6045263
Publication status	Published - Feb 2010
Event	2010 3rd International Conference on Nanoscience and Nanotechnology, ICONN - 2010 - Sydney, Australia Duration: 22 Feb 2010 → 26 Feb 2010

Other

Other	2010 3rd International Conference on Nanoscience and Nanotechnology, ICONN - 2010
Country	Australia
City	Sydney
Period	22/02/10 → 26/02/10

Keywords

Dielectric barrier discharge
Excimer
Materials processing
Photochemistry
Plasma
Surface modification
Vacuum ultraviolet

Access to Document

10.1109/ICONN.2010.6045263

Link to publication in Scopus

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Carman, R. J., Ward, B. K., & Kane, D. M. (2010). Development of incoherent EUV/VUV light sources: tailoring the output pulse characteristics for materials processing applications. In 2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010) (pp. 362-364). [6045263] Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/ICONN.2010.6045263

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title = "Development of incoherent EUV/VUV light sources: tailoring the output pulse characteristics for materials processing applications",

abstract = "The temporal characteristics of the output pulses generated by an excimer-based incoherent light source operating in the deep ultraviolet between 80nm160nm have been investigated in detail. Generation of output pulses with the highest peak powers, shortest durations (FWHM) and fastest leading-edge risetimes, occurred at the highest operating pressure studied (900mbar).",

keywords = "Dielectric barrier discharge, Excimer, Materials processing, Photochemistry, Plasma, Surface modification, Vacuum ultraviolet",

author = "Carman, {R. J.} and Ward, {B. K.} and Kane, {D. M.}",

year = "2010",

month = feb,

doi = "10.1109/ICONN.2010.6045263",

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booktitle = "2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010)",

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note = "2010 3rd International Conference on Nanoscience and Nanotechnology, ICONN - 2010 ; Conference date: 22-02-2010 Through 26-02-2010",

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Carman, RJ, Ward, BK & Kane, DM 2010, Development of incoherent EUV/VUV light sources: tailoring the output pulse characteristics for materials processing applications. in 2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010) ., 6045263, Institute of Electrical and Electronics Engineers (IEEE), Piscataway, N.J., pp. 362-364, 2010 3rd International Conference on Nanoscience and Nanotechnology, ICONN - 2010, Sydney, Australia, 22/02/10. https://doi.org/10.1109/ICONN.2010.6045263

Development of incoherent EUV/VUV light sources : tailoring the output pulse characteristics for materials processing applications. / Carman, R. J.; Ward, B. K.; Kane, D. M.

2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010) . Piscataway, N.J. : Institute of Electrical and Electronics Engineers (IEEE), 2010. p. 362-364 6045263.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

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AB - The temporal characteristics of the output pulses generated by an excimer-based incoherent light source operating in the deep ultraviolet between 80nm160nm have been investigated in detail. Generation of output pulses with the highest peak powers, shortest durations (FWHM) and fastest leading-edge risetimes, occurred at the highest operating pressure studied (900mbar).

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KW - Excimer

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KW - Photochemistry

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Carman RJ, Ward BK, Kane DM. Development of incoherent EUV/VUV light sources: tailoring the output pulse characteristics for materials processing applications. In 2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010) . Piscataway, N.J.: Institute of Electrical and Electronics Engineers (IEEE). 2010. p. 362-364. 6045263 https://doi.org/10.1109/ICONN.2010.6045263