Abstract
The temporal characteristics of the output pulses generated by an excimer-based incoherent light source operating in the deep ultraviolet between 80nm160nm have been investigated in detail. Generation of output pulses with the highest peak powers, shortest durations (FWHM) and fastest leading-edge risetimes, occurred at the highest operating pressure studied (900mbar).
Original language | English |
---|---|
Title of host publication | 2010 International Conference on Nanoscience and Nanotechnology (ICONN 2010) |
Place of Publication | Piscataway, N.J. |
Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
Pages | 362-364 |
Number of pages | 3 |
ISBN (Electronic) | 9781424452620, 9781424452620 |
ISBN (Print) | 9781424452613 |
DOIs | |
Publication status | Published - Feb 2010 |
Event | 2010 3rd International Conference on Nanoscience and Nanotechnology, ICONN - 2010 - Sydney, Australia Duration: 22 Feb 2010 → 26 Feb 2010 |
Other
Other | 2010 3rd International Conference on Nanoscience and Nanotechnology, ICONN - 2010 |
---|---|
Country/Territory | Australia |
City | Sydney |
Period | 22/02/10 → 26/02/10 |
Keywords
- Dielectric barrier discharge
- Excimer
- Materials processing
- Photochemistry
- Plasma
- Surface modification
- Vacuum ultraviolet