Development of silicon microelectrodes for cochlear implant technology

Joanna R. Parker; H. Barry Harrison; Graeme M. Clark; Jim Patrick; Olaf Reinhold

Development of silicon microelectrodes for cochlear implant technology

Joanna R. Parker^*, H. Barry Harrison, Graeme M. Clark, Jim Patrick, Olaf Reinhold

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

Silicon fabrication technology is being explored as a possible solution to the manufacturing of advanced cochlear implant electrode arrays. Silicon probes have been produced with thickness of 5 μm and coated in Parylene polymer to provide strength. To enable handling they are given a backing of silicone rubber before surgical use. This paper presents some techniques used to produce such silicon microelectrodes.

Original language	English
Title of host publication	Conference on Optoelectronic & Microelectronic Materials and Devices, Proceedings, COMMAD
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	12-15
Number of pages	4
Publication status	Published - 1996
Event	Proceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD - Canberra, Aust Duration: 8 Dec 1996 → 11 Dec 1996

Other

Other	Proceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD
City	Canberra, Aust
Period	8/12/96 → 11/12/96

Cite this

@inproceedings{5faf098f684443128dc2b859062a8cac,

title = "Development of silicon microelectrodes for cochlear implant technology",

abstract = "Silicon fabrication technology is being explored as a possible solution to the manufacturing of advanced cochlear implant electrode arrays. Silicon probes have been produced with thickness of 5 μm and coated in Parylene polymer to provide strength. To enable handling they are given a backing of silicone rubber before surgical use. This paper presents some techniques used to produce such silicon microelectrodes.",

author = "Parker, {Joanna R.} and Harrison, {H. Barry} and Clark, {Graeme M.} and Jim Patrick and Olaf Reinhold",

year = "1996",

language = "English",

pages = "12--15",

booktitle = "Conference on Optoelectronic & Microelectronic Materials and Devices, Proceedings, COMMAD",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "Proceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD ; Conference date: 08-12-1996 Through 11-12-1996",

}

Parker, JR, Harrison, HB, Clark, GM, Patrick, J & Reinhold, O 1996, Development of silicon microelectrodes for cochlear implant technology. in Conference on Optoelectronic & Microelectronic Materials and Devices, Proceedings, COMMAD. Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 12-15, Proceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD, Canberra, Aust, 8/12/96.

Development of silicon microelectrodes for cochlear implant technology. / Parker, Joanna R.; Harrison, H. Barry; Clark, Graeme M. et al.

Conference on Optoelectronic & Microelectronic Materials and Devices, Proceedings, COMMAD. Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 1996. p. 12-15.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - Development of silicon microelectrodes for cochlear implant technology

AU - Parker, Joanna R.

AU - Harrison, H. Barry

AU - Clark, Graeme M.

AU - Patrick, Jim

AU - Reinhold, Olaf

PY - 1996

Y1 - 1996

N2 - Silicon fabrication technology is being explored as a possible solution to the manufacturing of advanced cochlear implant electrode arrays. Silicon probes have been produced with thickness of 5 μm and coated in Parylene polymer to provide strength. To enable handling they are given a backing of silicone rubber before surgical use. This paper presents some techniques used to produce such silicon microelectrodes.

AB - Silicon fabrication technology is being explored as a possible solution to the manufacturing of advanced cochlear implant electrode arrays. Silicon probes have been produced with thickness of 5 μm and coated in Parylene polymer to provide strength. To enable handling they are given a backing of silicone rubber before surgical use. This paper presents some techniques used to produce such silicon microelectrodes.

UR - http://www.scopus.com/inward/record.url?scp=0030361668&partnerID=8YFLogxK

M3 - Conference proceeding contribution

AN - SCOPUS:0030361668

SP - 12

EP - 15

BT - Conference on Optoelectronic & Microelectronic Materials and Devices, Proceedings, COMMAD

PB - Institute of Electrical and Electronics Engineers (IEEE)

CY - Piscataway, NJ

T2 - Proceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD

Y2 - 8 December 1996 through 11 December 1996

ER -

Development of silicon microelectrodes for cochlear implant technology

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