Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing

Fredrik Nikolajeff, Sverker Hård, Bernard Curtis

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

A diffractive beam homogenizer, based on an array of square, off-axis, continuous-relief diffractive microlenses, for use with an excimer laser has been studied. We originally fabricated the homogenizer by direct-write electron-beam lithography, from which we made replicas in UV-grade fused silica by hot embossing and reactive ion etching. Atomic force microscopy measurements of original and replicated elements showed the accuracy of the replication fidelity. One of the replicated homogenizers was evaluated together with a KrF excimer laser. The homogenized beam had a flat-top profile with 31% of the beam energy contained within an area where the beam intensity was above a threshold level of 90% of the maximum intensity.

Original languageEnglish
Pages (from-to)8481-8489
Number of pages9
JournalApplied Optics
Volume36
Issue number32
DOIs
Publication statusPublished - 10 Nov 1997

Keywords

  • Diffractive optical element
  • Excimer laser
  • Homogenizer
  • Hot embossing
  • Reactive ion etching
  • Replication

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