Diffractive microlenses replicated in fused silica for excimer laser beam homogenizing

Fredrik Nikolajeff*, Sverker Hard, Bernard Curtis

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

A diffractive beam homogenizer, based on an array of square, off-axis, continuous-relief diffractive microlenses, for use with an excimer laser has been studied. The homogenizer was originally fabricated by direct-write electron-beam lithography, from which replicas in UV-grade fused silica were made by hot embossing and reactive ion etching. Atomic force microscopy measurements of original and replicated elements showed the accuracy of the replication fidelity. One of the replicated homogenizers was evaluated together with a KrF excimer laser. The homogenized beam had a flat-top profile with 31% of the beam energy contained within an area where the beam intensity was above a threshold level of 90% of the maximum intensity.

Original languageEnglish
Pages (from-to)1-24
Number of pages24
JournalDoktorsavhandlingar vid Chalmers Tekniska Hogskola
Issue number1263
Publication statusPublished - 1997

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