Direct write micromachining using high repetition rate UV lasers

Elizabeth K. Illy*, Michael J. Withford, Daniel J. W. Brown, James A. Piper

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

The improvement of the machining speed of direct write micropatterning of a number of different materials has been the subject of various studies. This article discusses results of linear scribing experiments. The given results demonstrate the enhanced processing speeds as well as address issues such as the effect of sample speed on material removal rates and methods of minimizing the size of the heat affected area.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics Europe, CLEO/Europe 1999
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages249-249
Number of pages1
ISBN (Print)078034233X
DOIs
Publication statusPublished - 1998
EventProceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98 - Glasgow, Scotland
Duration: 14 Sep 199818 Sep 1998

Other

OtherProceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98
CityGlasgow, Scotland
Period14/09/9818/09/98

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