Direct write micromachining using high repetition rate UV lasers

Elizabeth K. Illy; Michael J. Withford; Daniel J. W. Brown; James A. Piper

doi:10.1109/CLEOE.1998.719338

Direct write micromachining using high repetition rate UV lasers

Elizabeth K. Illy^*, Michael J. Withford, Daniel J. W. Brown, James A. Piper

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

The improvement of the machining speed of direct write micropatterning of a number of different materials has been the subject of various studies. This article discusses results of linear scribing experiments. The given results demonstrate the enhanced processing speeds as well as address issues such as the effect of sample speed on material removal rates and methods of minimizing the size of the heat affected area.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics Europe, CLEO/Europe 1999
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	249-249
Number of pages	1
ISBN (Print)	078034233X
DOIs	https://doi.org/10.1109/CLEOE.1998.719338
Publication status	Published - 1998
Event	Proceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98 - Glasgow, Scotland Duration: 14 Sep 1998 → 18 Sep 1998

Other

Other	Proceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98
City	Glasgow, Scotland
Period	14/09/98 → 18/09/98

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10.1109/CLEOE.1998.719338

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title = "Direct write micromachining using high repetition rate UV lasers",

abstract = "The improvement of the machining speed of direct write micropatterning of a number of different materials has been the subject of various studies. This article discusses results of linear scribing experiments. The given results demonstrate the enhanced processing speeds as well as address issues such as the effect of sample speed on material removal rates and methods of minimizing the size of the heat affected area.",

author = "Illy, {Elizabeth K.} and Withford, {Michael J.} and Brown, {Daniel J. W.} and Piper, {James A.}",

year = "1998",

doi = "10.1109/CLEOE.1998.719338",

language = "English",

isbn = "078034233X",

pages = "249--249",

booktitle = "Conference on Lasers and Electro-Optics Europe, CLEO/Europe 1999",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "Proceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98 ; Conference date: 14-09-1998 Through 18-09-1998",

}

Illy, EK, Withford, MJ, Brown, DJW & Piper, JA 1998, Direct write micromachining using high repetition rate UV lasers. in Conference on Lasers and Electro-Optics Europe, CLEO/Europe 1999., 719338, Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 249-249, Proceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98, Glasgow, Scotland, 14/09/98. https://doi.org/10.1109/CLEOE.1998.719338

Direct write micromachining using high repetition rate UV lasers. / Illy, Elizabeth K.; Withford, Michael J.; Brown, Daniel J. W.; Piper, James A.

Conference on Lasers and Electro-Optics Europe, CLEO/Europe 1999. Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 1998. p. 249-249 719338.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

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AB - The improvement of the machining speed of direct write micropatterning of a number of different materials has been the subject of various studies. This article discusses results of linear scribing experiments. The given results demonstrate the enhanced processing speeds as well as address issues such as the effect of sample speed on material removal rates and methods of minimizing the size of the heat affected area.

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BT - Conference on Lasers and Electro-Optics Europe, CLEO/Europe 1999

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T2 - Proceedings of the 1998 International Symposium on Information Theory, CLEO/EUROPE'98

Y2 - 14 September 1998 through 18 September 1998

ER -

Direct write micromachining using high repetition rate UV lasers

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