Electrical properties of Te-doped MOCVD grown GaSb Schottky diodes

A. H. Ramelan, K. S A Butcher, E. M. Goldys, T. L. Tansley, K. Tomsia

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    Abstract

    Dimethyltelluride has been used as a dopant source for GaSb epilayers grown by atmospheric pressure MOCVD (Metalorganic Chemical Vapour Deposition). Schottky diodes were fabricated using Al barriers and Au-Ge-Ni as Ohmic contact. Doping densities of about 4.1×1018 cm-3 and barrier heights of 0.63 eV are found from C-V measurements, compared to 0.59 eV determined from room temperature I-V measurements. Room temperature ideality factors are around 1.3, while its variation with temperature demonstrates the role of electron tunnelling through the depletion barrier. The carrier concentration probed by C-V is confirmed by van der Pauw Hall measurements. The effect of thermal annealing on the diodes is also reported.

    Original languageEnglish
    Title of host publicationCOMMAD 2000 Proceedings - Conference on Optoelectronic and Microelectronic Materials and Devices
    EditorsLeonard Broekman, Brian Usher, John Riley
    Place of PublicationWashington, DC
    PublisherInstitute of Electrical and Electronics Engineers (IEEE)
    Pages125-128
    Number of pages4
    Volume2000-January
    ISBN (Electronic)0780366980
    DOIs
    Publication statusPublished - 2000
    EventConference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2000 - Bundoora, Australia
    Duration: 6 Dec 20008 Dec 2000

    Other

    OtherConference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2000
    Country/TerritoryAustralia
    CityBundoora
    Period6/12/008/12/00

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    Copyright 2002 IEEE. Reprinted from Proceedings of the 2000 conference on optoelectronic and microelectronic materials and devices. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Macquarie University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to [email protected]. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.

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