Electron energy distribution functions for modelling the plasma kinetics in dielectric barrier discharges

R. J. Carman*, R. P. Mildren

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    31 Citations (Scopus)

    Abstract

    In modelling the plasma kinetics in dielectric barrier discharges (DBDs), the electron energy conservation equation is often included in the rate equation analysis (rather than utilizing the local-field approximation) with the assumption that the electron energy distribution function (EEDF) has a Maxwellian profile. We show that adopting a Maxwellian EEDF leads to a serious overestimate of the calculated ionization/excitation rate coefficients and the electron mobility for typical plasma conditions in a xenon DBD. Alternative EEDF profiles are trialed (Druyvesteyn, bi-Maxwellian and bi-Druyvesteyn) and benchmarked against EEDFs obtained from solving the steady-state Boltzmann equation. A bi-Druyvesteyn EEDF is shown to be more inherently accurate for modelling simulations of xenon DBDs.

    Original languageEnglish
    Pages (from-to)L99-L103
    Number of pages5
    JournalJournal of Physics D: Applied Physics
    Volume33
    Issue number19
    DOIs
    Publication statusPublished - 7 Oct 2000

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