In modelling the plasma kinetics in dielectric barrier discharges (DBDs), the electron energy conservation equation is often included in the rate equation analysis (rather than utilizing the local-field approximation) with the assumption that the electron energy distribution function (EEDF) has a Maxwellian profile. We show that adopting a Maxwellian EEDF leads to a serious overestimate of the calculated ionization/excitation rate coefficients and the electron mobility for typical plasma conditions in a xenon DBD. Alternative EEDF profiles are trialed (Druyvesteyn, bi-Maxwellian and bi-Druyvesteyn) and benchmarked against EEDFs obtained from solving the steady-state Boltzmann equation. A bi-Druyvesteyn EEDF is shown to be more inherently accurate for modelling simulations of xenon DBDs.
|Number of pages||5|
|Journal||Journal of Physics D: Applied Physics|
|Publication status||Published - 7 Oct 2000|