Abstract
MBE grown low temperature GaAs layers have been annealed at various temperatures up to 600 °C and their structural and transport properties examined. Excess As precipitation is confirmed by TEM measurements. Both hopping and band transport are present in the material annealed at temperatures up to 500 °C. The measured mobility for 600 °C annealed material agrees well with predictions of Monte Carlo calculations taking full account of precipitate scattering.
Original language | English |
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Title of host publication | 1996 Conference on Optoelectronic and Microelectronic Materials and Devices proceedings |
Place of Publication | Piscataway NJ |
Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
Pages | 349-352 |
Number of pages | 4 |
ISBN (Print) | 0780333748, 9780780333741 |
DOIs | |
Publication status | Published - 1996 |
Event | Proceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD - Canberra, Aust Duration: 8 Dec 1996 → 11 Dec 1996 |
Other
Other | Proceedings of the 1996 Conference on Optoelectronic & Microelectronic Materials and Devices, COMMAD |
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City | Canberra, Aust |
Period | 8/12/96 → 11/12/96 |