Enhanced depth control of ultrafast laser micromachining of microchannels in soda-lime glass

Ainara Rodríguez*, Alexander Arriola, Txaber Tavera, Noemí Pérez, Santiago M. Olaizola

*Corresponding author for this work

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Femtosecond laser micromachining has progressed considerably in the last decade due to the increasing interest in glass microsystems. In this work, we present a systematic study of the femtosecond laser ablation rate of soda-lime glass as a function of the deposited energy and pulse overlapping parameters. Experimental results demonstrate that the incubation effect reported by other authors can be neglected for particular process conditions and a constant ablation rate can be obtained, thus enhancing the depth control of the fabricated features.

Original languageEnglish
Pages (from-to)672-675
Number of pages4
JournalMicroelectronic Engineering
Volume98
DOIs
Publication statusPublished - Oct 2012
Externally publishedYes

Keywords

  • Femtosecond
  • Glass
  • Incubation
  • Laser
  • Microsystem
  • Soda-lime
  • Ultrafast

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