Extending the accuracy and range of an interferometer through subaperture stitching

Stephen O'Donohue*, Paul Dumas, Paul E. Murphy, Greg W. Forbes

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

4 Citations (Scopus)

Abstract

Subaperture stitching is a well-known technique for extending the effective aperture and dynamic range of phase measuring instruments. Several commercially available interferometers can automatically stitch flat surfaces, but practical solutions for stitching spherical and aspherical surfaces are inherently more complex. We have developed an interferometer workstation that can perform high-accuracy automated subaperture stitching of spheres, flats, and mild aspheres up to 280 mm in diameter. The Subaperture Stitching Interferometer (SSI®) workstation combines a six-axis precision stage system, a commercial Fizeau interferometer of 4" or 6" aperture, and a specially developed software package that automates measurement design, subaperture data acquisition, and the mathematical reconstruction of a full-aperture phase map. The stitching algorithms automatically compensates not only for positioning errors caused by the stage mechanics, but also for systematic errors such as imaging distortion and reference wave. Methods for calibrating systematic errors are discussed, and our ability to perform absolute measurements is analyzed. We present SSI stitched data, and compare stitched measurements to a calibrated full-aperture measurement.

Original languageEnglish
Title of host publicationProceedings of the 20th Annual ASPE Meeting, ASPE 2005
Place of PublicationRaleigh, NC
PublisherAmerican Society for Precision Engineering (ASPE)
Pages1-4
Number of pages4
ISBN (Print)1887706399, 9781887706391
Publication statusPublished - 2005
Externally publishedYes
Event20th Annual Meeting of the American Society for Precision Engineering, ASPE 2005 - Norfolk, VA, United States
Duration: 9 Oct 200514 Oct 2005

Other

Other20th Annual Meeting of the American Society for Precision Engineering, ASPE 2005
CountryUnited States
CityNorfolk, VA
Period9/10/0514/10/05

Keywords

  • Absolute calibration
  • Error compensation
  • Interferometry
  • SSI
  • Subaperture stitching

Fingerprint Dive into the research topics of 'Extending the accuracy and range of an interferometer through subaperture stitching'. Together they form a unique fingerprint.

Cite this