Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings

Fredrik Nikolajeff, Björn Löfving, Mathias Johansson, Jörgen Bengtsson, Sverker Hård, Claus Heine

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

With the aim of reducing surface reflections and increasing the diffraction efficiency we investigated the superposition of subwavelength phase gratings onto blazed phase gratings. With direct-write electronbeam lithography bare blazed gratings and blazed gratings carrying subwavelength gratings were fabricated and their optical performances compared. For TE polarization the subwavelength-carrying gratings showed a maximum diffraction efficiency of 90.6%, whereas the corresponding maximum value for the bare grating was 86.3%. The experiment was simulated with rigorous diffraction theory.

Original languageEnglish
Pages (from-to)4842-4846
Number of pages5
JournalApplied Optics
Volume39
Issue number26
DOIs
Publication statusPublished - 10 Sep 2000

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    Nikolajeff, F., Löfving, B., Johansson, M., Bengtsson, J., Hård, S., & Heine, C. (2000). Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings. Applied Optics, 39(26), 4842-4846. https://doi.org/10.1364/AO.39.004842