Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings

Fredrik Nikolajeff*, Bjorn Lofving, Mathias Johansson, Jorgen Bengtsson, Sverker Hard, Claus Heine

*Corresponding author for this work

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

With the aim to reduce surface reflections and to increase the diffraction efficiency we have investigated the superposition of subwavelength phase gratings onto blazed phase gratings. Using direct write electron-beam lithography bare blazed gratings and blazed gratings carrying subwavelength gratings were fabricated and their optical performances compared. For TE-polarization the subwavelength carrying gratings showed a maximum diffraction efficiency of 90.6%, whereas the corresponding maximum value for the bare grating was 86.3%. The experiment was simulated using rigorous diffraction theory.

Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalDoktorsavhandlingar vid Chalmers Tekniska Hogskola
Issue number1560
Publication statusPublished - 1999

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