Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings

Fredrik Nikolajeff*, Bjorn Lofving, Mathias Johansson, Jorgen Bengtsson, Sverker Hard, Claus Heine

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)

    Abstract

    With the aim to reduce surface reflections and to increase the diffraction efficiency we have investigated the superposition of subwavelength phase gratings onto blazed phase gratings. Using direct write electron-beam lithography bare blazed gratings and blazed gratings carrying subwavelength gratings were fabricated and their optical performances compared. For TE-polarization the subwavelength carrying gratings showed a maximum diffraction efficiency of 90.6%, whereas the corresponding maximum value for the bare grating was 86.3%. The experiment was simulated using rigorous diffraction theory.

    Original languageEnglish
    Pages (from-to)1-5
    Number of pages5
    JournalDoktorsavhandlingar vid Chalmers Tekniska Hogskola
    Issue number1560
    Publication statusPublished - 1999

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