The manufacturing and electrochemical characterisation of an array of 20 boron doped nanocrystalline diamond (BNCD) microband electrodes for use in a poly(dimethylsiloxane) (PDMS) based microfluidic system are described. The electrodes were fabricated by plasma etching of a silicon oxide- and BNCD thin film coated silicon wafer and the resulting surface structured silicon wafer was subsequently bonded to the PDMS so that the BNCD microband electrodes were located within the PDMS microchannel. The electrochemical performance of the BNCD electrodes was studied and the electrodes were found to exhibit significantly better stability than previously employed gold microband arrays.
- Diamond film
- Electrochemical applications
- Micro electromechanical systems