Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles

M. Asadnia, A. G P Kottapalli, Z. Shen, J. M. Miao*, G. Barbastathis, M. S. Triantafyllou

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

12 Citations (Scopus)

Abstract

In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages126-129
Number of pages4
ISBN (Print)9781467356558
DOIs
Publication statusPublished - 2013
Externally publishedYes
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 20 Jan 201324 Jan 2013

Other

OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period20/01/1324/01/13

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