Abstract
In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.
Original language | English |
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Title of host publication | IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 |
Place of Publication | Piscataway, NJ |
Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
Pages | 126-129 |
Number of pages | 4 |
ISBN (Print) | 9781467356558 |
DOIs | |
Publication status | Published - 2013 |
Externally published | Yes |
Event | IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan Duration: 20 Jan 2013 → 24 Jan 2013 |
Other
Other | IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 |
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Country/Territory | Taiwan |
City | Taipei |
Period | 20/01/13 → 24/01/13 |