Abstract
Focussed ion beam milling, combined with secondary ion and secondary electron imaging, has been used to evaluate the internal homogeneity of silica glass microspheres. Internal inhomogeneities that will result in non-uniform optical properties are found. The method is demonstrated as suitable for evaluating internal optical quality of the silica microspheres qualitatively. Basic studies to determine whether differences in chemical composition can be differentiated from density differences and topological contouring are required before the technique can be evaluated for more quantitative application.
Original language | English |
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Title of host publication | 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings |
Place of Publication | Piscataway, NJ |
Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
Pages | 109-110 |
Number of pages | 2 |
ISBN (Print) | 9781424473328 |
DOIs | |
Publication status | Published - 2010 |
Event | 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 - Canberra, ACT, Australia Duration: 12 Dec 2010 → 15 Dec 2010 |
Other
Other | 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 |
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Country/Territory | Australia |
City | Canberra, ACT |
Period | 12/12/10 → 15/12/10 |