Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to growth dynamics

Cormac Corr, Robert John Carman, Rod Boswell, conor martin, Marie Wintrebert-Fouquet, Satya Barik

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Original language	English
Title of host publication	63rd Gaseous Electronics Conference & 7th International Conference on Reactive plasmas
Editors	M. Hori, W. G. Graham
Place of Publication	Japan
Publisher	Japan Society of Applied Physics (JSAP)
Pages	1-2
Number of pages	2
ISBN (Print)	9784863481015
Publication status	Published - 2010
Event	Conference on Gaseous Electronics and International Conference on Reactive Plasmas - Paris Duration: 4 Oct 2010 → 8 Oct 2010

Conference	Conference on Gaseous Electronics and International Conference on Reactive Plasmas
City	Paris
Period	4/10/10 → 8/10/10

Cite this

Corr, C., Carman, R. J., Boswell, R., martin, C., Wintrebert-Fouquet, M., & Barik, S. (2010). Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to growth dynamics. In M. Hori, & W. G. Graham (Eds.), 63rd Gaseous Electronics Conference & 7th International Conference on Reactive plasmas (pp. 1-2). Japan Society of Applied Physics (JSAP).

Corr, Cormac ; Carman, Robert John ; Boswell, Rod et al. / Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to growth dynamics. 63rd Gaseous Electronics Conference & 7th International Conference on Reactive plasmas. editor / M. Hori ; W. G. Graham. Japan : Japan Society of Applied Physics (JSAP), 2010. pp. 1-2

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author = "Cormac Corr and Carman, {Robert John} and Rod Boswell and conor martin and Marie Wintrebert-Fouquet and Satya Barik",

year = "2010",

language = "English",

isbn = "9784863481015",

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booktitle = "63rd Gaseous Electronics Conference & 7th International Conference on Reactive plasmas",

publisher = "Japan Society of Applied Physics (JSAP)",

note = "Conference on Gaseous Electronics and International Conference on Reactive Plasmas ; Conference date: 04-10-2010 Through 08-10-2010",

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Corr, C, Carman, RJ, Boswell, R, martin, C, Wintrebert-Fouquet, M & Barik, S 2010, Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to growth dynamics. in M Hori & WG Graham (eds), 63rd Gaseous Electronics Conference & 7th International Conference on Reactive plasmas. Japan Society of Applied Physics (JSAP), Japan, pp. 1-2, Conference on Gaseous Electronics and International Conference on Reactive Plasmas, Paris, 4/10/10.

Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to growth dynamics. / Corr, Cormac; Carman, Robert John; Boswell, Rod et al.
63rd Gaseous Electronics Conference & 7th International Conference on Reactive plasmas. ed. / M. Hori; W. G. Graham. Japan: Japan Society of Applied Physics (JSAP), 2010. p. 1-2.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to growth dynamics

AU - Corr, Cormac

AU - Carman, Robert John

AU - Boswell, Rod

AU - martin, conor

AU - Wintrebert-Fouquet, Marie

AU - Barik, Satya

PY - 2010

Y1 - 2010

M3 - Conference proceeding contribution

SN - 9784863481015

SP - 1

EP - 2

BT - 63rd Gaseous Electronics Conference & 7th International Conference on Reactive plasmas

A2 - Hori, M.

A2 - Graham, W. G.

PB - Japan Society of Applied Physics (JSAP)

CY - Japan

T2 - Conference on Gaseous Electronics and International Conference on Reactive Plasmas

Y2 - 4 October 2010 through 8 October 2010

ER -

Corr C, Carman RJ, Boswell R, martin C, Wintrebert-Fouquet M, Barik S. Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to growth dynamics. In Hori M, Graham WG, editors, 63rd Gaseous Electronics Conference & 7th International Conference on Reactive plasmas. Japan: Japan Society of Applied Physics (JSAP). 2010. p. 1-2