Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to growth dynamics

Cormac Corr, Robert John Carman, Rod Boswell, conor martin, Marie Wintrebert-Fouquet, Satya Barik

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

Original languageEnglish
Title of host publication63rd Gaseous Electronics Conference & 7th International Conference on Reactive plasmas
EditorsM. Hori, W. G. Graham
Place of PublicationJapan
PublisherJapan Society of Applied Physics (JSAP)
Pages1-2
Number of pages2
ISBN (Print)9784863481015
Publication statusPublished - 2010
EventConference on Gaseous Electronics and International Conference on Reactive Plasmas - Paris
Duration: 4 Oct 20108 Oct 2010

Conference

ConferenceConference on Gaseous Electronics and International Conference on Reactive Plasmas
CityParis
Period4/10/108/10/10

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