@inproceedings{9c946f32c2da47508bac1cbcc1ff41b0,
title = "Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to growth dynamics",
author = "Cormac Corr and Carman, {Robert John} and Rod Boswell and conor martin and Marie Wintrebert-Fouquet and Satya Barik",
year = "2010",
language = "English",
isbn = "9784863481015",
pages = "1--2",
editor = "M. Hori and Graham, {W. G.}",
booktitle = "63rd Gaseous Electronics Conference & 7th International Conference on Reactive plasmas",
publisher = "Japan Society of Applied Physics (JSAP)",
note = "Conference on Gaseous Electronics and International Conference on Reactive Plasmas ; Conference date: 04-10-2010 Through 08-10-2010",
}