Grazing incidence X-ray photoemission spectroscopy provides a method of obtaining information about surface chemical composition as well as the variation of composition with depth. Photoemission spectra are taken as X-rays are directed onto a surface over a range of incidence angles near the critical angle for total external reflection. The technique is particularly suited to the study of surface layers in the thickness range 10-40 Å, using X-rays in the energy range of 1-2 keV. We have implemented the technique in a geometry that minimizes distortion of the spectral lineshape by keeping a fixed relationship between the sample and the electron spectrometer. We present data taken in the laboratory that illustrate its application to the study of oxide films on Ge. The counting time for a spectrum would be shortened considerably by implementing the method on a soft X-ray beamline at a synchrotron light source. We present a method for doing so that retains the advantages of a fixed geometry between the sample and the electron spectrometer.
|Number of pages
|Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment
|Published - 11 Aug 1994