Growth of highly (112) oriented Cu2ZnSnS4 thin film on sapphire substrate by radio frequency magnetron sputtering

Ning Song; Xiaojing Hao; Binesh Puthen-Veettil; Shujuan Huang; Martin A. Green

doi:10.1557/opl.2014.405

Growth of highly (112) oriented Cu₂ZnSnS₄ thin film on sapphire substrate by radio frequency magnetron sputtering

Ning Song, Xiaojing Hao, Binesh Puthen-Veettil, Shujuan Huang, Martin A. Green

Research output: Contribution to journal › Conference paper › peer-review

Abstract

For structural investigation, highly (112) oriented tetragonal Cu₂ZnSnS₄ (CZTS) thin films on hexagonal sapphire (0001) single crystal substrates were obtained by radio frequency (RE) magnetron sputtering. The influences of the deposition parameters, such as substrate temperature (T_Sub) and working Ar pressure (P_ar) on the chemical composition and structural properties of as deposited CZTS films were investigated. The film sputtered at 500°C has the only orientation of (112), also, it bears the best structural quality with pure CZTS phase and an estimated band gap of 1.5 leV.

Original language	English
Pages (from-to)	7-11
Number of pages	5
Journal	MRS Online Proceedings
Volume	1640
Early online date	6 May 2014
DOIs	https://doi.org/10.1557/opl.2014.405
Publication status	Published - 2014
Externally published	Yes
Event	2013 MRS Fall Meeting - Boston, United States Duration: 1 Dec 2013 → 6 Dec 2013

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title = "Growth of highly (112) oriented Cu2ZnSnS4 thin film on sapphire substrate by radio frequency magnetron sputtering",

abstract = "For structural investigation, highly (112) oriented tetragonal Cu2ZnSnS4 (CZTS) thin films on hexagonal sapphire (0001) single crystal substrates were obtained by radio frequency (RE) magnetron sputtering. The influences of the deposition parameters, such as substrate temperature (TSub) and working Ar pressure (Par) on the chemical composition and structural properties of as deposited CZTS films were investigated. The film sputtered at 500°C has the only orientation of (112), also, it bears the best structural quality with pure CZTS phase and an estimated band gap of 1.5 leV.",

author = "Ning Song and Xiaojing Hao and Binesh Puthen-Veettil and Shujuan Huang and Green, {Martin A.}",

year = "2014",

doi = "10.1557/opl.2014.405",

language = "English",

volume = "1640",

pages = "7--11",

journal = "MRS Online Proceedings",

issn = "1946-4274",

publisher = "Cambridge University Press (CUP)",

note = "2013 MRS Fall Meeting ; Conference date: 01-12-2013 Through 06-12-2013",

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TY - JOUR

T1 - Growth of highly (112) oriented Cu2ZnSnS4 thin film on sapphire substrate by radio frequency magnetron sputtering

AU - Song, Ning

AU - Hao, Xiaojing

AU - Puthen-Veettil, Binesh

AU - Huang, Shujuan

AU - Green, Martin A.

PY - 2014

Y1 - 2014

N2 - For structural investigation, highly (112) oriented tetragonal Cu2ZnSnS4 (CZTS) thin films on hexagonal sapphire (0001) single crystal substrates were obtained by radio frequency (RE) magnetron sputtering. The influences of the deposition parameters, such as substrate temperature (TSub) and working Ar pressure (Par) on the chemical composition and structural properties of as deposited CZTS films were investigated. The film sputtered at 500°C has the only orientation of (112), also, it bears the best structural quality with pure CZTS phase and an estimated band gap of 1.5 leV.

AB - For structural investigation, highly (112) oriented tetragonal Cu2ZnSnS4 (CZTS) thin films on hexagonal sapphire (0001) single crystal substrates were obtained by radio frequency (RE) magnetron sputtering. The influences of the deposition parameters, such as substrate temperature (TSub) and working Ar pressure (Par) on the chemical composition and structural properties of as deposited CZTS films were investigated. The film sputtered at 500°C has the only orientation of (112), also, it bears the best structural quality with pure CZTS phase and an estimated band gap of 1.5 leV.

UR - http://www.scopus.com/inward/record.url?scp=84938300003&partnerID=8YFLogxK

U2 - 10.1557/opl.2014.405

DO - 10.1557/opl.2014.405

M3 - Conference paper

SN - 1946-4274

VL - 1640

SP - 7

EP - 11

JO - MRS Online Proceedings

JF - MRS Online Proceedings

T2 - 2013 MRS Fall Meeting

Y2 - 1 December 2013 through 6 December 2013

ER -

Growth of highly (112) oriented Cu₂ZnSnS₄ thin film on sapphire substrate by radio frequency magnetron sputtering

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