Growth of highly (112) oriented Cu2ZnSnS4 thin film on sapphire substrate by radio frequency magnetron sputtering

Ning Song, Xiaojing Hao, Binesh Puthen-Veettil, Shujuan Huang, Martin A. Green

Research output: Contribution to journalConference paperpeer-review


For structural investigation, highly (112) oriented tetragonal Cu2ZnSnS4 (CZTS) thin films on hexagonal sapphire (0001) single crystal substrates were obtained by radio frequency (RE) magnetron sputtering. The influences of the deposition parameters, such as substrate temperature (TSub) and working Ar pressure (Par) on the chemical composition and structural properties of as deposited CZTS films were investigated. The film sputtered at 500°C has the only orientation of (112), also, it bears the best structural quality with pure CZTS phase and an estimated band gap of 1.5 leV.

Original languageEnglish
Pages (from-to)7-11
Number of pages5
JournalMRS Online Proceedings
Early online date6 May 2014
Publication statusPublished - 2014
Externally publishedYes
Event2013 MRS Fall Meeting - Boston, United States
Duration: 1 Dec 20136 Dec 2013

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