Hetero-epitaxial Γ-Al2O3 on Si (100) substrate by sputtering

Y. X. Liao*, S. Shrestha, S. J. Huang, G. Conibeer

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Hetero-epitaxial Γ-Al2O3 on Si (100) substrate by sputtering'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemistry