High-precision micromachining at MHz repetition rates

A. Fuerbach, A. Fernandez, A. Apolonski, T. Fuji, F. Krausz

Research output: Contribution to conference › Abstract

Original language	English
Publication status	Published - 2004
Event	2nd European Conference on Applications of Femtosecond Lasers in Materials Science - Bad Kleinkirchheim, Austria Duration: 25 Feb 2004 → 28 Feb 2004

Conference	2nd European Conference on Applications of Femtosecond Lasers in Materials Science
City	Bad Kleinkirchheim, Austria
Period	25/02/04 → 28/02/04

Cite this

@conference{6011f6bac6c1423a8c5c7aacbb59f503,

title = "High-precision micromachining at MHz repetition rates",

author = "A. Fuerbach and A. Fernandez and A. Apolonski and T. Fuji and F. Krausz",

year = "2004",

language = "English",

note = "2nd European Conference on Applications of Femtosecond Lasers in Materials Science ; Conference date: 25-02-2004 Through 28-02-2004",

}