High pulse repetition frequency ultra violet laser micro-machining of polymers and glasses

Elizabeth K. Illy*, John M. Tocher, James A. Piper

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

As the demand for smaller manufactured structures increases, the techniques for efficient and economical UV micromachining continue to draw more attention. In the paper we investigate UV micropatterning methods in PETG, glass, and aluminum, comparing the commonly used percussion drilling with the flexible direct write methods. Issues such as sample speed and material removal rates as well as the size of heat effected areas are discussed.

Original languageEnglish
Title of host publicationICALEO '97
Subtitle of host publicationlaser materials processing conference: proceedings: November 17-20, 1997, San Diego, CA
EditorsRemy Fabbro, Aravinda Kar, Akira Matsunawa
Place of PublicationOrlando, FL
PublisherLaser Institute of America
PagesA81-A90
Number of pages10
ISBN (Print)9780912035567, 0912035560
Publication statusPublished - 1997
EventProceedings of the 1997 Laser Materials Processing Conference, ICALEO'97. Part 1 (of 2) - San Diego, CA, USA
Duration: 17 Nov 199720 Nov 1997

Publication series

NameLaser Institute of America series
PublisherLaser Institute of America
Volume83

Other

OtherProceedings of the 1997 Laser Materials Processing Conference, ICALEO'97. Part 1 (of 2)
CitySan Diego, CA, USA
Period17/11/9720/11/97

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