@inproceedings{66ac7ef89c614fb0bcc8727dd090c432,
title = "High pulse repetition frequency ultra violet laser micro-machining of polymers and glasses",
abstract = "As the demand for smaller manufactured structures increases, the techniques for efficient and economical UV micromachining continue to draw more attention. In the paper we investigate UV micropatterning methods in PETG, glass, and aluminum, comparing the commonly used percussion drilling with the flexible direct write methods. Issues such as sample speed and material removal rates as well as the size of heat effected areas are discussed.",
author = "Illy, {Elizabeth K.} and Tocher, {John M.} and Piper, {James A.}",
year = "1997",
language = "English",
isbn = "9780912035567",
series = "Laser Institute of America series",
publisher = "Laser Institute of America",
pages = "A81--A90",
editor = "Remy Fabbro and Aravinda Kar and Akira Matsunawa",
booktitle = "ICALEO '97",
address = "United States",
note = "Proceedings of the 1997 Laser Materials Processing Conference, ICALEO'97. Part 1 (of 2) ; Conference date: 17-11-1997 Through 20-11-1997",
}