High-resolution electron beam lithography for the fabrication of high-density dielectric metamaterials

Engineering & Materials Science

• Electron beam lithography 100%
• Metamaterials 76%
• Fabrication 47%
• Dry etching 46%
• Diffraction patterns 45%
• Silicon nitride 39%
• Electron beams 38%
• Optoelectronic devices 37%
• Lithography 35%
• Fractals 33%
• Silica 33%
• Coatings 24%
• Substrates 22%
• Communication 16%

Physics & Astronomy

• lithography 53%
• electron beams 46%
• high resolution 39%
• fabrication 39%
• optical activity 26%
• optoelectronic devices 21%
• silicon nitrides 20%
• charging 19%
• fractals 19%
• communication 17%
• diffraction patterns 17%
• occurrences 17%
• silicon dioxide 16%
• etching 16%
• coatings 14%
• dosage 14%

Chemistry

• Electron Beam 70%
• Dielectric Material 56%
• Optical Rotation 23%
• Nitride 20%
• Communication 19%
• Optoelectronics 19%
• Etching 19%
• Dose 16%
• Coating Agent 12%
• Application 6%