High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing

J. Ascorbe, C. Sanz, J. M. Corres, F. J. Arregui, I. R. Matias, S. C. Mukhopadhyay

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

5 Citations (Scopus)

Abstract

In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.

Original languageEnglish
Title of host publicationICST 2015
Subtitle of host publicationproceedings of the 9th International Conference on Sensing Technology
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages143-146
Number of pages4
ISBN (Electronic)9781479963140
DOIs
Publication statusPublished - 2015
Externally publishedYes
Event9th International Conference on Sensing Technology, ICST 2015 - Auckland, New Zealand
Duration: 8 Dec 201511 Dec 2015

Other

Other9th International Conference on Sensing Technology, ICST 2015
CountryNew Zealand
CityAuckland
Period8/12/1511/12/15

Keywords

  • Fabry-Pèrot
  • humidity sensor
  • interferometer
  • tin oxide

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