High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing

J. Ascorbe, C. Sanz, J. M. Corres, F. J. Arregui, I. R. Matias, S. C. Mukhopadhyay

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionResearchpeer-review

Abstract

In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.

LanguageEnglish
Title of host publicationICST 2015
Subtitle of host publicationproceedings of the 9th International Conference on Sensing Technology
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages143-146
Number of pages4
ISBN (Electronic)9781479963140
DOIs
Publication statusPublished - 2015
Externally publishedYes
Event9th International Conference on Sensing Technology, ICST 2015 - Auckland, New Zealand
Duration: 8 Dec 201511 Dec 2015

Other

Other9th International Conference on Sensing Technology, ICST 2015
CountryNew Zealand
CityAuckland
Period8/12/1511/12/15

Fingerprint

Fabry-Perot interferometers
Atmospheric humidity
Humidity sensors
Interferometry
Sputtering
Optical fibers
Semiconductor materials

Keywords

  • Fabry-Pèrot
  • humidity sensor
  • interferometer
  • tin oxide

Cite this

Ascorbe, J., Sanz, C., Corres, J. M., Arregui, F. J., Matias, I. R., & Mukhopadhyay, S. C. (2015). High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing. In ICST 2015: proceedings of the 9th International Conference on Sensing Technology (pp. 143-146). Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/ICSensT.2015.7438380
Ascorbe, J. ; Sanz, C. ; Corres, J. M. ; Arregui, F. J. ; Matias, I. R. ; Mukhopadhyay, S. C. / High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing. ICST 2015: proceedings of the 9th International Conference on Sensing Technology. Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 2015. pp. 143-146
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abstract = "In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-P{\'e}rot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20{\%} to 90{\%}, which implies a sensitivity of 1.27 nm/{\%}RH.",
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Ascorbe, J, Sanz, C, Corres, JM, Arregui, FJ, Matias, IR & Mukhopadhyay, SC 2015, High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing. in ICST 2015: proceedings of the 9th International Conference on Sensing Technology. Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 143-146, 9th International Conference on Sensing Technology, ICST 2015, Auckland, New Zealand, 8/12/15. https://doi.org/10.1109/ICSensT.2015.7438380

High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing. / Ascorbe, J.; Sanz, C.; Corres, J. M.; Arregui, F. J.; Matias, I. R.; Mukhopadhyay, S. C.

ICST 2015: proceedings of the 9th International Conference on Sensing Technology. Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 2015. p. 143-146.

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionResearchpeer-review

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Ascorbe J, Sanz C, Corres JM, Arregui FJ, Matias IR, Mukhopadhyay SC. High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing. In ICST 2015: proceedings of the 9th International Conference on Sensing Technology. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE). 2015. p. 143-146 https://doi.org/10.1109/ICSensT.2015.7438380