High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing

J. Ascorbe; C. Sanz; J. M. Corres; F. J. Arregui; I. R. Matias; S. C. Mukhopadhyay

doi:10.1109/ICSensT.2015.7438380

High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing

J. Ascorbe, C. Sanz, J. M. Corres, F. J. Arregui, I. R. Matias, S. C. Mukhopadhyay

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

5 Citations (Scopus)

Abstract

In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.

Original language	English
Title of host publication	ICST 2015
Subtitle of host publication	proceedings of the 9th International Conference on Sensing Technology
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	143-146
Number of pages	4
ISBN (Electronic)	9781479963140
DOIs	https://doi.org/10.1109/ICSensT.2015.7438380
Publication status	Published - 2015
Externally published	Yes
Event	9th International Conference on Sensing Technology, ICST 2015 - Auckland, New Zealand Duration: 8 Dec 2015 → 11 Dec 2015

Other

Other	9th International Conference on Sensing Technology, ICST 2015
Country/Territory	New Zealand
City	Auckland
Period	8/12/15 → 11/12/15

Keywords

Fabry-Pèrot
humidity sensor
interferometer
tin oxide

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10.1109/ICSensT.2015.7438380

Cite this

Ascorbe, J., Sanz, C., Corres, J. M., Arregui, F. J., Matias, I. R., & Mukhopadhyay, S. C. (2015). High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing. In ICST 2015: proceedings of the 9th International Conference on Sensing Technology (pp. 143-146). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/ICSensT.2015.7438380

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title = "High sensitivity extrinsic Fabry-P{\`e}rot interferometer for humidity sensing",

abstract = "In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-P{\'e}rot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.",

keywords = "Fabry-P{\`e}rot, humidity sensor, interferometer, tin oxide",

author = "J. Ascorbe and C. Sanz and Corres, {J. M.} and Arregui, {F. J.} and Matias, {I. R.} and Mukhopadhyay, {S. C.}",

year = "2015",

doi = "10.1109/ICSensT.2015.7438380",

language = "English",

pages = "143--146",

booktitle = "ICST 2015",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "9th International Conference on Sensing Technology, ICST 2015 ; Conference date: 08-12-2015 Through 11-12-2015",

}

Ascorbe, J, Sanz, C, Corres, JM, Arregui, FJ, Matias, IR & Mukhopadhyay, SC 2015, High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing. in ICST 2015: proceedings of the 9th International Conference on Sensing Technology. Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 143-146, 9th International Conference on Sensing Technology, ICST 2015, Auckland, New Zealand, 8/12/15. https://doi.org/10.1109/ICSensT.2015.7438380

High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing. / Ascorbe, J.; Sanz, C.; Corres, J. M.; Arregui, F. J.; Matias, I. R.; Mukhopadhyay, S. C.

ICST 2015: proceedings of the 9th International Conference on Sensing Technology. Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 2015. p. 143-146.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing

AU - Ascorbe, J.

AU - Sanz, C.

AU - Corres, J. M.

AU - Arregui, F. J.

AU - Matias, I. R.

AU - Mukhopadhyay, S. C.

PY - 2015

Y1 - 2015

N2 - In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.

AB - In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.

KW - Fabry-Pèrot

KW - humidity sensor

KW - interferometer

KW - tin oxide

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U2 - 10.1109/ICSensT.2015.7438380

DO - 10.1109/ICSensT.2015.7438380

M3 - Conference proceeding contribution

SP - 143

EP - 146

BT - ICST 2015

PB - Institute of Electrical and Electronics Engineers (IEEE)

CY - Piscataway, NJ

T2 - 9th International Conference on Sensing Technology, ICST 2015

Y2 - 8 December 2015 through 11 December 2015

ER -

High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing

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