Abstract
In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.
| Language | English |
|---|---|
| Title of host publication | ICST 2015 |
| Subtitle of host publication | proceedings of the 9th International Conference on Sensing Technology |
| Place of Publication | Piscataway, NJ |
| Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| Pages | 143-146 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781479963140 |
| DOIs | |
| Publication status | Published - 2015 |
| Externally published | Yes |
| Event | 9th International Conference on Sensing Technology, ICST 2015 - Auckland, New Zealand Duration: 8 Dec 2015 → 11 Dec 2015 |
Other
| Other | 9th International Conference on Sensing Technology, ICST 2015 |
|---|---|
| Country | New Zealand |
| City | Auckland |
| Period | 8/12/15 → 11/12/15 |
Fingerprint
Keywords
- Fabry-Pèrot
- humidity sensor
- interferometer
- tin oxide
Cite this
}
High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing. / Ascorbe, J.; Sanz, C.; Corres, J. M.; Arregui, F. J.; Matias, I. R.; Mukhopadhyay, S. C.
ICST 2015: proceedings of the 9th International Conference on Sensing Technology. Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 2015. p. 143-146.Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › Research › peer-review
TY - GEN
T1 - High sensitivity extrinsic Fabry-Pèrot interferometer for humidity sensing
AU - Ascorbe, J.
AU - Sanz, C.
AU - Corres, J. M.
AU - Arregui, F. J.
AU - Matias, I. R.
AU - Mukhopadhyay, S. C.
PY - 2015
Y1 - 2015
N2 - In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.
AB - In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.
KW - Fabry-Pèrot
KW - humidity sensor
KW - interferometer
KW - tin oxide
UR - http://www.scopus.com/inward/record.url?scp=84964850724&partnerID=8YFLogxK
U2 - 10.1109/ICSensT.2015.7438380
DO - 10.1109/ICSensT.2015.7438380
M3 - Conference proceeding contribution
SP - 143
EP - 146
BT - ICST 2015
PB - Institute of Electrical and Electronics Engineers (IEEE)
CY - Piscataway, NJ
ER -