Abstract
In this work we present a high sensitivity optical fiber humidity sensor. The configuration chosen for this purpose is a Fabry-Pérot interferometer. The device has been fabricated by means of sputtering. A semiconductor material was used to build the nano-cavity which produces the interferometry. Then the device was introduced into a climatic chamber in order to change relative humidity. Changes of 88 nm have been obtained for relative humidity varying from 20% to 90%, which implies a sensitivity of 1.27 nm/%RH.
Original language | English |
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Title of host publication | ICST 2015 |
Subtitle of host publication | proceedings of the 9th International Conference on Sensing Technology |
Place of Publication | Piscataway, NJ |
Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
Pages | 143-146 |
Number of pages | 4 |
ISBN (Electronic) | 9781479963140 |
DOIs | |
Publication status | Published - 2015 |
Externally published | Yes |
Event | 9th International Conference on Sensing Technology, ICST 2015 - Auckland, New Zealand Duration: 8 Dec 2015 → 11 Dec 2015 |
Other
Other | 9th International Conference on Sensing Technology, ICST 2015 |
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Country/Territory | New Zealand |
City | Auckland |
Period | 8/12/15 → 11/12/15 |
Keywords
- Fabry-Pèrot
- humidity sensor
- interferometer
- tin oxide