Micromachining of solid polymer materials is a highly promising area of application for pulsed UV lasers. The establishment of optimum pulse repetition rates (PRF) for maximum processing speed in UV laser micromachining of specific polymer materials has been discussed. The etch rate measurements for microdrilling of polymers using high-PRF frequency-quadrupled diode-pumped Nd:YAG lasers, as well as the quality of the structures obtained has been presented.
|Number of pages||1|
|Journal||Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS|
|Publication status||Published - 1997|