High-speed microdrilling of polymers using high PRF UV lasers

Elizabeth K. Illy; Michael J. Withford; Daniel J. W. Brown; James A. Piper

doi:10.1109/CLEO.1997.603263

High-speed microdrilling of polymers using high PRF UV lasers

Elizabeth K. Illy^*, Michael J. Withford, Daniel J. W. Brown, James A. Piper

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Micromachining of solid polymer materials is a highly promising area of application for pulsed UV lasers. The establishment of optimum pulse repetition rates (PRF) for maximum processing speed in UV laser micromachining of specific polymer materials has been discussed. The etch rate measurements for microdrilling of polymers using high-PRF frequency-quadrupled diode-pumped Nd:YAG lasers, as well as the quality of the structures obtained has been presented.

Original language	English
Pages (from-to)	359
Number of pages	1
Journal	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	11
DOIs	https://doi.org/10.1109/CLEO.1997.603263
Publication status	Published - 1997

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10.1109/CLEO.1997.603263

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title = "High-speed microdrilling of polymers using high PRF UV lasers",

abstract = "Micromachining of solid polymer materials is a highly promising area of application for pulsed UV lasers. The establishment of optimum pulse repetition rates (PRF) for maximum processing speed in UV laser micromachining of specific polymer materials has been discussed. The etch rate measurements for microdrilling of polymers using high-PRF frequency-quadrupled diode-pumped Nd:YAG lasers, as well as the quality of the structures obtained has been presented.",

author = "Illy, {Elizabeth K.} and Withford, {Michael J.} and Brown, {Daniel J. W.} and Piper, {James A.}",

year = "1997",

doi = "10.1109/CLEO.1997.603263",

language = "English",

volume = "11",

pages = "359",

journal = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

issn = "1092-8081",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

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T1 - High-speed microdrilling of polymers using high PRF UV lasers

AU - Illy, Elizabeth K.

AU - Withford, Michael J.

AU - Brown, Daniel J. W.

AU - Piper, James A.

PY - 1997

Y1 - 1997

N2 - Micromachining of solid polymer materials is a highly promising area of application for pulsed UV lasers. The establishment of optimum pulse repetition rates (PRF) for maximum processing speed in UV laser micromachining of specific polymer materials has been discussed. The etch rate measurements for microdrilling of polymers using high-PRF frequency-quadrupled diode-pumped Nd:YAG lasers, as well as the quality of the structures obtained has been presented.

AB - Micromachining of solid polymer materials is a highly promising area of application for pulsed UV lasers. The establishment of optimum pulse repetition rates (PRF) for maximum processing speed in UV laser micromachining of specific polymer materials has been discussed. The etch rate measurements for microdrilling of polymers using high-PRF frequency-quadrupled diode-pumped Nd:YAG lasers, as well as the quality of the structures obtained has been presented.

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U2 - 10.1109/CLEO.1997.603263

DO - 10.1109/CLEO.1997.603263

M3 - Article

AN - SCOPUS:0030671861

SN - 1092-8081

VL - 11

SP - 359

JO - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

JF - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

ER -

High-speed microdrilling of polymers using high PRF UV lasers

Abstract

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