High-Speed UV Micro-Machining of Polymers with Frequency-Doubled Copper Vapor Lasers

Alison C J Glover, Elizabeth K. Illy, James A. Piper

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)

Abstract

We report high-speed ultra-violet (UV) micro-machining of polymers using a high beam quality frequency-doubled copper vapor laser (CVL). The characteristics of the UV laser source and beam delivery optics are described. Measurements of material removal rates have been made for a number of polymers. Results for UV-CVL micro-drilling of PETG and polyimide (kapton) show removal rates per pulse similar to other UV sources, but the high pulse repetition frequency of the UV-CVL results in much enhanced temporal material removal rates.

Original languageEnglish
Pages (from-to)830-836
Number of pages7
JournalIEEE Journal of Selected Topics in Quantum Electronics
Volume1
Issue number3
DOIs
Publication statusPublished - 1995

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