We report high-speed ultra-violet (UV) micro-machining of polymers using a high beam quality frequency-doubled copper vapor laser (CVL). The characteristics of the UV laser source and beam delivery optics are described. Measurements of material removal rates have been made for a number of polymers. Results for UV-CVL micro-drilling of PETG and polyimide (kapton) show removal rates per pulse similar to other UV sources, but the high pulse repetition frequency of the UV-CVL results in much enhanced temporal material removal rates.
|Number of pages||7|
|Journal||IEEE Journal of Selected Topics in Quantum Electronics|
|Publication status||Published - 1995|