High temperature characterization of PZT(0.52/0.48) thin-film pressure sensors

M. Asadnia; A. G P Kottapalli; J. M. Miao; A. B. Randles; A. Sabbagh; P. Kropelnicki; J. M. Tsai

doi:10.1088/0960-1317/24/1/015017

High temperature characterization of PZT(0.52/0.48) thin-film pressure sensors

M. Asadnia, A. G P Kottapalli, J. M. Miao, A. B. Randles, A. Sabbagh, P. Kropelnicki, J. M. Tsai

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

This paper reports the characterization and real-time testing of thin-film Pb(Zr_0.52Ti0.48) (PZT) micro diaphragm pressure sensor at high temperature (up to 390 °C) and high pressure (up to 105 kPa) conditions. Firstly, the influence of thermal stress on micro diaphragm deformation is investigated theoretically and experimentally. Secondly, the effect of rhombohedral-tetragonal, tetragonal-cubic phase transitions and lattice parameter changes of the PZT composite on the resonance frequency are studied. Thirdly, a good performance of the proposed sensor at low-frequency oscillatory flow generated by a vibrating sphere source (frequency of 35 Hz) in silicone oil bath at different temperatures is reported. The observations lead to the conclusion that despite the fluctuations on resonant frequency with increasing temperature, the proposed PZT sensor can be effectively used in high temperature/pressure applications.

Original language	English
Article number	015017
Pages (from-to)	1-12
Number of pages	12
Journal	Journal of Micromechanics and Microengineering
Volume	24
Issue number	1
DOIs	https://doi.org/10.1088/0960-1317/24/1/015017
Publication status	Published - Jan 2014
Externally published	Yes

Keywords

high pressure sensing
high temperature sensing
piezoelectric pressure sensor
PZT characterizations in harsh environment

Access to Document

10.1088/0960-1317/24/1/015017

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title = "High temperature characterization of PZT(0.52/0.48) thin-film pressure sensors",

abstract = "This paper reports the characterization and real-time testing of thin-film Pb(Zr0.52Ti0.48) (PZT) micro diaphragm pressure sensor at high temperature (up to 390 °C) and high pressure (up to 105 kPa) conditions. Firstly, the influence of thermal stress on micro diaphragm deformation is investigated theoretically and experimentally. Secondly, the effect of rhombohedral-tetragonal, tetragonal-cubic phase transitions and lattice parameter changes of the PZT composite on the resonance frequency are studied. Thirdly, a good performance of the proposed sensor at low-frequency oscillatory flow generated by a vibrating sphere source (frequency of 35 Hz) in silicone oil bath at different temperatures is reported. The observations lead to the conclusion that despite the fluctuations on resonant frequency with increasing temperature, the proposed PZT sensor can be effectively used in high temperature/pressure applications.",

keywords = "high pressure sensing, high temperature sensing, piezoelectric pressure sensor, PZT characterizations in harsh environment",

author = "M. Asadnia and Kottapalli, {A. G P} and Miao, {J. M.} and Randles, {A. B.} and A. Sabbagh and P. Kropelnicki and Tsai, {J. M.}",

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AU - Asadnia, M.

AU - Kottapalli, A. G P

AU - Miao, J. M.

AU - Randles, A. B.

AU - Sabbagh, A.

AU - Kropelnicki, P.

AU - Tsai, J. M.

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