Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging

D. M. Kane*, R. J. Chater, D. S. McPhail

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

1 Citation (Scopus)

Abstract

Focussed ion beam milling, combined with secondary ion and secondary electron imaging, is used to evaluate internal imperfections in glass microspheres. Flaws on the nano-scale and micro-scale are exposed. Glass aging can also be characterised.

Original languageEnglish
Title of host publicationProceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages2105-2107
Number of pages3
ISBN (Electronic)9780977565788, 9781457719400
ISBN (Print)9781457719394
DOIs
Publication statusPublished - 2011
EventInternational Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim - 2011 - Sydney, NSW, Australia
Duration: 28 Aug 20111 Sep 2011

Other

OtherInternational Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim - 2011
CountryAustralia
CitySydney, NSW
Period28/08/111/09/11

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