Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging

D. M. Kane; R. J. Chater; D. S. McPhail

doi:10.1109/IQEC-CLEO.2011.6194151

Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging

D. M. Kane^*, R. J. Chater, D. S. McPhail

^*Corresponding author for this work

MQ Photonics Research Centre

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

1 Citation (Scopus)

Abstract

Focussed ion beam milling, combined with secondary ion and secondary electron imaging, is used to evaluate internal imperfections in glass microspheres. Flaws on the nano-scale and micro-scale are exposed. Glass aging can also be characterised.

Original language	English
Title of host publication	Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	2105-2107
Number of pages	3
ISBN (Electronic)	9780977565788, 9781457719400
ISBN (Print)	9781457719394
DOIs	https://doi.org/10.1109/IQEC-CLEO.2011.6194151
Publication status	Published - 2011
Event	International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim - 2011 - Sydney, NSW, Australia Duration: 28 Aug 2011 → 1 Sept 2011

Other

Other	International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim - 2011
Country/Territory	Australia
City	Sydney, NSW
Period	28/08/11 → 1/09/11

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10.1109/IQEC-CLEO.2011.6194151

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Kane, D. M., Chater, R. J., & McPhail, D. S. (2011). Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging. In Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011 (pp. 2105-2107). [6194151] Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/IQEC-CLEO.2011.6194151

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title = "Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging",

abstract = "Focussed ion beam milling, combined with secondary ion and secondary electron imaging, is used to evaluate internal imperfections in glass microspheres. Flaws on the nano-scale and micro-scale are exposed. Glass aging can also be characterised.",

author = "Kane, {D. M.} and Chater, {R. J.} and McPhail, {D. S.}",

year = "2011",

doi = "10.1109/IQEC-CLEO.2011.6194151",

language = "English",

isbn = "9781457719394",

pages = "2105--2107",

booktitle = "Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim - 2011 ; Conference date: 28-08-2011 Through 01-09-2011",

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Kane, DM, Chater, RJ & McPhail, DS 2011, Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging. in Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011., 6194151, Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 2105-2107, International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim - 2011, Sydney, NSW, Australia, 28/08/11. https://doi.org/10.1109/IQEC-CLEO.2011.6194151

Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging. / Kane, D. M.; Chater, R. J.; McPhail, D. S.
Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE), 2011. p. 2105-2107 6194151.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

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PY - 2011

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N2 - Focussed ion beam milling, combined with secondary ion and secondary electron imaging, is used to evaluate internal imperfections in glass microspheres. Flaws on the nano-scale and micro-scale are exposed. Glass aging can also be characterised.

AB - Focussed ion beam milling, combined with secondary ion and secondary electron imaging, is used to evaluate internal imperfections in glass microspheres. Flaws on the nano-scale and micro-scale are exposed. Glass aging can also be characterised.

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DO - 10.1109/IQEC-CLEO.2011.6194151

M3 - Conference proceeding contribution

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SN - 9781457719394

SP - 2105

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BT - Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011

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Kane DM, Chater RJ, McPhail DS. Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging. In Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE). 2011. p. 2105-2107. 6194151 doi: 10.1109/IQEC-CLEO.2011.6194151

Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging

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